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Kunihiro Furuya

Tokyo Electron

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Publication

Featured researches published by Kunihiro Furuya.

Archive | 1998

Semiconductor wafer holder with spring-mounted temperature measurement apparatus disposed therein

Kunihiro Furuya; Toshihiro Yonezawa; Ken Int. Property Dept. Inoue; Yoichi Nakagomi

Archive | 2004

Probe pins zero-point detecting method, and prober

Katsuya Okumura; Kunihiro Furuya

Archive | 1995

Inspection apparatus, transportation apparatus, and temperature control apparatus

Toshihiro Yonezawa; Tsuyoshi Argua; Kunihiro Furuya; Junichi Hagihara

Archive | 2005

Probe method, prober, and electrode reducing/plasma-etching processing mechanism

Katsuya Okumura; Shigekazu Komatsu; Yuichi Abe; Kunihiro Furuya; Vincent Vezin; Kenichi Kubo

Archive | 1999

Temperature managing apparatus for multi-stage container

Yoichi Nakagomi; Kunihiro Furuya; Hiroshi Tsukada

Archive | 1998

Semiconductor wafer holding apparatus and semiconductor wafer storage chamber

Kunihiro Furuya; Ken Int. Property Dept. Inoue; Yoichi Nakagomi; Toshihiro Yonezawa

Archive | 2013

METHOD OF CONTACTING SUBSTRATE WITH PROBE CARD

Kunihiro Furuya; Hiroshi Yamada; Takanori Hyakudomi; Jun Mochizuki

Archive | 2012

SUPPORT BODY FOR CONTACT TERMINALS AND PROBE CARD

Jun Mochizuki; Kunihiro Furuya

Archive | 2003

プローブ方法、プローブ装置、及び電極の還元／プラズマエッチング処理機構

Katsuya Okumura; Shigekazu Komatsu; Yuichi Abe; Kunihiro Furuya; Vincent Vezin; Kenichi Kubo

Archive | 2003

Probing method, probe, and mechanism for reducing/plasma etching electrode

Katsuya Okumura; Shigekazu Komatsu; Yuichi Abe; Kunihiro Furuya; Vincent Vezin; Kenichi Kubo

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Katsuya Okumura

Tokyo Electron

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Toshihiro Yonezawa

Tokyo Electron

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Yoichi Nakagomi

Tokyo Electron

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Ken Int. Property Dept. Inoue

Tokyo Electron

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Kenichi Kubo

Tokyo Electron

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Vincent Vezin

Tokyo Electron

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Jun Mochizuki

Tokyo Electron

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Hiroshi Tsukada

Tokyo Electron

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Hiroshi Yamada

Tokyo Electron

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Junichi Hagihara

Tokyo Electron

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