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Toshihiro Yonezawa

Tokyo Electron

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Publication

Featured researches published by Toshihiro Yonezawa.

Archive | 1998

Semiconductor wafer holder with spring-mounted temperature measurement apparatus disposed therein

Kunihiro Furuya; Toshihiro Yonezawa; Ken Int. Property Dept. Inoue; Yoichi Nakagomi

Archive | 2003

Mechanism for fixing probe card

Toshihiro Yonezawa

Archive | 1995

Inspection apparatus, transportation apparatus, and temperature control apparatus

Toshihiro Yonezawa; Tsuyoshi Argua; Kunihiro Furuya; Junichi Hagihara

Archive | 2002

Water temperature controller

Hiroshi Tsukada; Toshihiro Yonezawa; 弘志 塚田; 俊裕 米沢

Archive | 2005

Probe and manufacturing method therefor

Katsuya Okumura; Toshihiro Yonezawa; 勝弥 奥村; 俊裕 米沢

Archive | 2003

Probe card fixing mechanism

Toshihiro Yonezawa; 俊裕 米沢

Archive | 2005

Probe and method of manufacturing probe

Katsuya Okumura; Toshihiro Yonezawa

Archive | 2006

Probe device and method of regulating contact pressure between object to be inspected and probe

Toshihiro Yonezawa; Syuichi Tsukada

Archive | 2004

PROBE CARD HAVING PARALLEL ADJUSTMENT MECHANISM

Takashi Amamiya; Hisatomi Hosaka; Shuichi Tsukada; Toshihiro Yonezawa; 久富 保坂; 秀一 塚田; 俊裕 米沢; 貴 雨宮

Archive | 1998

Semiconductor wafer holding apparatus and semiconductor wafer storage chamber

Kunihiro Furuya; Ken Int. Property Dept. Inoue; Yoichi Nakagomi; Toshihiro Yonezawa

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Collaboration

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Kunihiro Furuya

Tokyo Electron

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Ken Int. Property Dept. Inoue

Tokyo Electron

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Yoichi Nakagomi

Tokyo Electron

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Hiroshi Tsukada

Tokyo Electron

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Katsuya Okumura

University of Tokyo

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Hisatomi Hosaka

Tokyo Electron

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Junichi Hagihara

Tokyo Electron

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Shinichiro Takase

Tokyo Electron

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Syuichi Tsukada

Tokyo Electron

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Tsuyoshi Argua

Tokyo Electron

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