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20th International Symposium on Automation and Robotics in Construction | 2003

Development of Frontward Sensing Radar Using Electromagnetic Waves for the Microtunneling Method

Shinobu Tsutsumi; Kyoichi Miyazaki; Shigeru Yamaguchi; Hidenori Hino

For safe and efficient execution using the microtunneling method, it is necessary to understand both buried objects and ground information. The authors adopted an electromagnetic wave sensing system, devised an antenna that can be installed in a microtunneling driving machine with a diameter of approximately ø350 mm, and incorporated an original analysis algorithm to develop a frontward sensing system capable of automatically judging the locations of buried objects. This system made it possible to accurately detect both the presence and distance to buried objects to the front and sides of the driving machine, thus improving driving safety and efficiency.


Archive | 1994

Displacement detection device, aligner provided with said displacement detection device and manufacture of device

Kyoichi Miyazaki; Seiji Takeuchi; Minoru Yoshii; 実 吉井; 恭一 宮▲崎▼; 誠二 竹内


Archive | 1995

Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head

Minoru Yoshii; Kyoichi Miyazaki; Seiji Takeuchi


Archive | 1993

Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern

Toshihiko Tsuji; Seiji Takeuchi; Kyoichi Miyazaki; Minoru Yoshii; Noriyuki Nose; Tetsuzo Mori


Archive | 1997

Chemical mechanical polishing apparatus and method

Kazuo Takahashi; Matsuomi Nishimura; Kyoichi Miyazaki; Shinzo Uchiyama


Archive | 1996

Inspection system and device manufacturing method using the same

Masayuki Suzuki; Noriyuki Nose; Minoru Yoshii; Kyoichi Miyazaki; Toshihiko Tsuji; Seiji Takeuchi


Archive | 1997

Surface position detecting system and exposure apparatus using the same

Minoru Yoshii; Masanobu Hasegawa; Kyoichi Miyazaki


Archive | 1992

Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position

Toshihiko Tsuji; Kyoichi Miyazaki; Seiji Takeuchi; Minoru Yoshii; Noriyuki Nose


Archive | 1997

Surface position detecting system and projection exposure apparatus using the same

Masanobu Hasegawa; Minoru Yoshii; Kyoichi Miyazaki


Archive | 1995

Foreign particle inspecting system

Seiji Takeuchi; Kyoichi Miyazaki; Toshihiko Tsuji

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