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Kyung-dae Kim

Samsung

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Publication

Featured researches published by Kyung-dae Kim.

Archive | 2002

Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus

Yun-sik Yang; Kyung-dae Kim; Hyung-sik Hong; Min-Gyu Kim

Archive | 2002

System and method for drying semiconductor substrate

Hun-jung Yi; Ki-Seok Seo Lee; Bo-yong Lee; Sang-oh Park; Pil-kwon Jun; Sang-mun Chon; Kyung-dae Kim

Archive | 2003

Resist and etching by-product removing composition and resist removing method using the same

Dong-jin Park; Kyung-dae Kim; Sang-mun Chon; Jin-ho Hwang; Il-Hyun Sohn; Sang-oh Park; Pil-kwon Jun

Archive | 2000

Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same

Yun-sik Yang; Hun Cha; Kyung-dae Kim; Min-Gyu Kim

Archive | 2004

Cleaning solution and method of cleaning anti-reflective coating composition using the same

Dong-jin Park; Kyung-dae Kim; Hoi-Sik Chung; Pil-kwon Jun; Young-Ho Kim

Archive | 2004

Cleaning solution for removing anti-reflective coating composition

Dong-jin Park; Kyung-dae Kim; Hoi-Sik Chung; Pil-kwon Jun; Young-Ho Kim

Archive | 2002

System und Verfahren zum Trocknen von Halbleitersubstraten System and method for drying semiconductor substrates

Hun-jung Yi; Kyung-dae Kim; Sang-mun Chon; Ki-Seok Seo Lee; Bo-yong Lee; Sang-oh Park; Pil-kwon Jun

Archive | 2002

Composition useful for removing resist layers in the manufacture of semiconductor devices comprises an N-hydroxyalkyl alkoxyalkanamide and a swelling agent

Dong-jin Park; Kyung-dae Kim; Sang-mun Chon; Jin-ho Hwang; Il-Hyun Sohn; Sang-oh Park; Pil-kwon Jun

Archive | 2002

Zusammensetzung und Verfahren zur Resistentfernung Composition and method for resist removal

Sang-mun Chon; Jin-ho Hwang; Pil-kwon Jun; Kyung-dae Kim; Dong-jin Park; Sang-oh Park; Il-Hyun Sohn

Archive | 2002

Zusammensetzung und Verfahren zur Resistentfernung

Sang-mun Chon; Jin-ho Hwang; Pil-kwon Jun; Kyung-dae Kim; Dong-jin Park; Sang-oh Park; Il-Hyun Sohn

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Pil-kwon Jun

Samsung

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Dong-jin Park

Samsung

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Sang-mun Chon

Samsung

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Sang-oh Park

Samsung

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Il-Hyun Sohn

Samsung

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Jin-ho Hwang

Samsung

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Bo-yong Lee

Samsung

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Hoi-Sik Chung

Samsung

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Hun-Jung Suwon Yi

Samsung

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Hun-jung Yi

Samsung

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