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Hun-Jung Suwon Yi

Samsung

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Publication

Featured researches published by Hun-Jung Suwon Yi.

Archive | 2004

Drying apparatus for e.g. semiconductor wafer, has vent unit that controls flow of drying material to uniformly or substantially uniformly dry semiconductor wafer in drying chamber

Sang-oh Park; Hun-Jung Suwon Yi

Archive | 2004

Semiconductor substrate cleaning method in integrated circuit manufacture, involves moving separation plate formed with exhaust path between cleaning and drying rooms, for separating both rooms, after moving wafer support to drying room

Sang-oh Park; Hun-Jung Suwon Yi

Archive | 2004

Method and apparatus for cleaning Halbleitersubsstraten

Sang-Oh Yongin Park; Hun-Jung Suwon Yi

Archive | 2004

Vorrichtung und Verfahren zum Trocknen von Halbleitersubstraten

Sang-Oh Park; Hun-Jung Suwon Yi

Archive | 2003

Gerät mit einem Überführungsroboter zur Herstellung einer integrierten Schaltungsvorrichtung und Verwendung des Gerätes Device with a transfer robot for the manufacture of an integrated circuit device and using the device

Pil-kwon Jun; Yong-Kyun Ko; Kwang Shin Yongin Lim; Sang-Oh Seongnam Park; Hun-Jung Suwon Yi

Archive | 2003

Vorrichtung zum Trocknen von Halbleitersubstraten unter Verwendung des Azeotrop-Effekts und ein Trocknungsverfahren, das diese Vorrichtung verwendet An apparatus for drying of semiconductor substrates using the azeotrope-effect and a drying method using this apparatus

Sang-Mun Yongin Chon; Pil-kwon Jun; Jin-Sung Suwon Kim; Yong-Kyun Ko; Kwang-Shin Yongin Lim; Sang-Oh Seongnam Park; Hun-Jung Suwon Yi

Archive | 2003

Gerät zur Herstellung einer integrierten Schaltungsvorrichtung An apparatus for manufacturing an integrated circuit device

Pil-kwon Jun; Yong-Kyun Ko; Kwang Shin Yongin Lim; Sang-Oh Seongnam Park; Hun-Jung Suwon Yi

Archive | 2003

Gerät mit einem Überführungsroboter zur Herstellung einer integrierten Schaltungsvorrichtung und Verwendung des Gerätes

Pil-kwon Jun; Yong-Kyun Ko; Kwang Shin Yongin Lim; Sang-Oh Seongnam Park; Hun-Jung Suwon Yi

Archive | 2003

Apparatus for producing an integrated circuit device

Pil-kwon Jun; Yong-Kyun Ko; Kwang Shin Yongin Lim; Sang-Oh Seongnam Park; Hun-Jung Suwon Yi

Archive | 2002

System zum Trocknen von Halbleitersubstraten The system for drying semiconductor substrates

Sang-Mun Sungnam Chon; Pil-kwon Jun; Kyung-dae Kim; Bo-Yong Osan Lee; Ki-Seok Seo Lee; Sang-Oh Sungnam Park; Hun-Jung Suwon Yi

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Pil-kwon Jun

Samsung

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Yong-Kyun Ko

Samsung

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Kyung-dae Kim

Samsung

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Sang-oh Park

Samsung

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