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Sang-oh Park

Samsung

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Publication

Featured researches published by Sang-oh Park.

Archive | 2003

Apparatus for manufacturing integrated circuit device

Kwang-shin Lim; Pil-kwon Jun; Hun-jung Yi; Sang-oh Park; Yong-Kyun Ko

Archive | 2002

System and method for drying semiconductor substrate

Hun-jung Yi; Ki-Seok Seo Lee; Bo-yong Lee; Sang-oh Park; Pil-kwon Jun; Sang-mun Chon; Kyung-dae Kim

Archive | 2003

Resist and etching by-product removing composition and resist removing method using the same

Dong-jin Park; Kyung-dae Kim; Sang-mun Chon; Jin-ho Hwang; Il-Hyun Sohn; Sang-oh Park; Pil-kwon Jun

Archive | 2005

Wafer guides for processing semiconductor substrates

Pil-kwon Jun; Sang-oh Park; Yong-Kyun Ko; Hun-jung Yi

Archive | 2006

Apparatus and method for drying substrates used to manufacture semiconductor devices

Sang-oh Park

Archive | 2004

Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus

Sang-mun Chon; Jin-Sung Kim; Pil-kwon Jun; Sang-oh Park; Yong-Kyun Ko; Kwang-shin Lim; Hun-jung Yi

Archive | 2004

Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer

Hun-jung Yi; Won-Young Chung; Sang-oh Park; Yero Lee

Archive | 2004

Apparatus and method for drying semiconductor substrates

Hun-jung Yi; Sang-oh Park

Archive | 2005

Method of detecting a defect in a semiconductor device

Hyun-Beom Shin; Sang-oh Park

Archive | 2014

SEMICONDUCTOR DEVICES INCLUDING UNITARY SUPPORTS

Sang-oh Park; Chang-hwan Kim; Hwan Namkoong; Jun-Young Jang

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Collaboration

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Pil-kwon Jun

Samsung

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Hun-jung Yi

Samsung

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Sang-mun Chon

Samsung

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Kyung-dae Kim

Samsung

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Dong-jin Park

Samsung

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Il-Hyun Sohn

Samsung

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Jin-ho Hwang

Samsung

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Yong-Kyun Ko

Samsung

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Bo-yong Lee

Samsung

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Hun-Jung Suwon Yi

Samsung

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