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Larry Zhao

GlobalFoundries

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Publication

Featured researches published by Larry Zhao.

Archive | 2014

METHODS OF FORMING GRAPHENE LINERS AND/OR CAP LAYERS ON COPPER-BASED CONDUCTIVE STRUCTURES

Errol Todd Ryan; Zoran Krivokapic; Xunyuan Zhang; Christian Witt; Ming He; Larry Zhao

Archive | 2016

Electro-migration enhancing method for self-forming barrier process in copper mettalization

Moosung M. Chae; Larry Zhao

Archive | 2013

METHODS OF FORMING CAP LAYERS FOR SEMICONDUCTOR DEVICES WITH SELF-ALIGNED CONTACT ELEMENTS AND THE RESULTING DEVICES

Ruilong Xie; Xiuyu Cai; Larry Zhao

Archive | 2013

HYBRID MANGANESE AND MANGANESE NITRIDE BARRIERS FOR BACK-END-OF-LINE METALLIZATION AND METHODS FOR FABRICATING THE SAME

Xunyuan Zhang; Moosung M. Chae; Larry Zhao

Archive | 2012

Semiconductor device having a self-forming barrier layer at via bottom

Larry Zhao; Ming He; Xunyuan Zhang; Sean Xuan Lin

Archive | 2012

METHODS OF FORMING COPPER-BASED CONDUCTIVE STRUCTURES ON AN INTEGRATED CIRCUIT DEVICE

Sean X. Lin; Ming He; Xunyuan Zhang; Larry Zhao

Archive | 2014

METHODS OF FORMING A METAL CAP LAYER ON COPPER-BASED CONDUCTIVE STRUCTURES ON AN INTEGRATED CIRCUIT DEVICE

Xunyuan Zhang; Hoon Kim; Christian Witt; Larry Zhao

Archive | 2012

METHODS OF FORMING COPPER-BASED CONDUCTIVE STRUCTURES BY FORMING A COPPER-BASED SEED LAYER HAVING AN AS-DEPOSITED THICKNESS PROFILE AND THEREAFTER PERFORMING AN ETCHING PROCESS AND ELECTROLESS COPPER DEPOSITION

Sean X. Lin; Ming He; Xunyuan Zhang; Larry Zhao

Archive | 2016

INTEGRATED CIRCUITS WITH AN AIR GAP AND METHODS OF PRODUCING THE SAME

Ming He; Errol Todd Ryan; Roderick Alan Augur; Craig Child; Larry Zhao

Archive | 2013

Methods of forming conductive copper-based structures using a copper-based nitride seed layer without a barrier layer and the resulting device

Xunyuan Zhang; Larry Zhao; Ming He; Sean Lin; John Iacoponi; Errol Todd Ryan

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Ming He

GlobalFoundries

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Xunyuan Zhang

GlobalFoundries

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Errol Todd Ryan

GlobalFoundries

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Moosung M. Chae

GlobalFoundries

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Sean X. Lin

GlobalFoundries

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Christian Witt

GlobalFoundries

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John Iacoponi

GlobalFoundries

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Kunaljeet Tanwar

GlobalFoundries

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Sean Lin

GlobalFoundries

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Ailian Zhao

GlobalFoundries

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