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Lawrence Wong

Applied Materials

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Publication

Featured researches published by Lawrence Wong.

Archive | 2012

TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP

Satoru Kobayashi; Lawrence Wong; Jonathan Liu; Yang Yang; Kartik Ramaswamy; Shahid Rauf; Shane C. Nevil; Kallol Bera; Kenneth S. Collins

Archive | 2007

Plasma reactor with reduced electrical skew using a conductive baffle

Shahid Rauf; Kenneth S. Collins; Kallol Bera; Kartik Ramaswamy; Andrew Nguyen; Steven Shannon; Lawrence Wong; Satoru Kobayashi; Troy S. Detrick; James P. Cruse

Archive | 2007

Plasma reactor with reduced electrical skew using electrical bypass elements

Shahid Rauf; Kenneth S. Collins; Kallol Bera; Kartik Ramaswamy; Hiroji Hanawa; Andrew Nguyen; Steven Shannon; Lawrence Wong; Satoru Kobayashi; Troy S. Detrick; James P. Cruse

Archive | 2007

Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes

Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun

Archive | 2007

Plasma reactor with wide process window employing plural vhf sources

Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun

Archive | 2008

PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES

Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun

Archive | 2007

PLASMA PROCESS UNIFORMITY ACROSS A WAFER BY CONTROLLING A VARIABLE FREQUENCY COUPLED TO A HARMONIC RESONATOR

Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun

Archive | 2009

Apparatus for VHF impedance match tuning

Kartik Ramaswamy; Hiroji Hanawa; Kenneth S. Collins; Lawrence Wong; Samer Banna; Andrew Nguyen

Archive | 2008

CAPACITIVELY COUPLED PLASMA ETCH CHAMBER WITH MULTIPLE RF FEEDS

Hiroji Hanawa; Saturo Kobayashi; Lawrence Wong

Archive | 2010

Plasma reactor with rf generator and automatic impedance match with minimum reflected power-seeking control

Chunlei Zhang; Lawrence Wong; Kartik Ramaswamy; James P. Cruse; Hiroji Hanawa

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Kartik Ramaswamy

Applied Materials

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Kenneth S. Collins

Applied Materials

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Andrew Nguyen

University of Utah

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Hiroji Hanawa

Applied Materials

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Shahid Rauf

Applied Materials

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Steven Lane

Applied Materials

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Yang Yang

Applied Materials

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Douglas A. Buchberger

Applied Materials

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James P. Cruse

Applied Materials

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Kallol Bera

Applied Materials

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