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Linda Mero Ephrath

IBM

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Publication

Featured researches published by Linda Mero Ephrath.

Archive | 1982

Method of filling trenches with silicon and structures

Linda Mero Ephrath; Victor Joseph Silvestri; D.D. Tang

Archive | 1979

Reactive ion etching

Linda Mero Ephrath

Archive | 1986

Trench etch endpoint detection by LIF

Reid Stuart Bennett; Linda Mero Ephrath; Geraldine Cogin Schwartz; Gary S. Selwyn

Archive | 1981

Reactive ion etching apparatus with interlaced perforated anode

Linda Mero Ephrath

Archive | 1983

Method of filling trenches in semiconductor substrates with silicon

Linda Mero Ephrath; Victor Joseph Silvestri; D.D. Tang

Archive | 1983

METHOD FOR REACTIVE ION ETCHING OF AN ELEMENT

Linda Mero Ephrath

Archive | 1982

PERFORATED ANODE FOR USE IN REACTIVE ION ETCHING APPARATUS

Linda Mero Ephrath

Archive | 1987

Feststellung des Endpunktes beim Graben-Ätzen durch laserinduzierte Fluoreszenz.

Reid Stuart Bennett; Linda Mero Ephrath; Geraldine Cogin Schwartz; Gary S. Selwyn

Archive | 1987

Trench etch endpoint detection by laser-induced fluorescence

Reid Stuart Bennett; Linda Mero Ephrath; Geraldine Cogin Schwartz; Gary S. Selwyn

Archive | 1982

Lithographic reactive ion etching method

Ernest Bassous; Linda Mero Ephrath

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Gary S. Selwyn

IBM

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Geraldine Cogin Schwartz

IBM

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Reid Stuart Bennett

IBM

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Victor Joseph Silvestri

IBM

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D.D. Tang

TSMC

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Ernest Bassous

IBM

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