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Dive into the research topics where Lu Dike is active.

Publication


Featured researches published by Lu Dike.


Journal of Semiconductors | 2013

A substrate-free optical readout focal plane array with a heat sink structure

Liu Rmwen; Kong Yanmei; Jiao Binbin; Li Zhigang; Shang Haiping; Lu Dike; Gao Chaoqun; Chen Dapeng; Zhang Qingchuan

A substrate-free optical readout focal plane array (FPA) operating in 8–12 μm with a heat sink structure (HSS) was fabricated and its performance was tested. The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity. The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively. The heat sink is fabricated successfully by electroplating copper, which provides high thermal capacity and high thermal conductivity, on the frame of substrate-free FPA. The FPA was tested in the optical-readout system, the results show that the response and NETD are 13.6 grey/K (F / # = 0.8) and 588 mK, respectively.


Archive | 2013

Method for isolating functional structure Si and sacrificial layer Si in bulk silicon machining

Liu Ruiwen; Jiao Binbin; Kong Yanmei; Li Zhigang; Lu Dike; Chen Dapeng


Archive | 2015

Hole forming method of single event effect test chip

Li Zhigang; Lu Dike; Ou Yi; Ou Wen; Liu Gang; Chen Dapeng


Archive | 2015

Optical reading heat-mechanical infrared detector structure and manufacturing method thereof

Liu Ruiwen; Jiao Binbin; Kong Yanmei; Shang Haiping; Li Zhigang; Lu Dike; Gao Chaoqun; Chen Dapeng


Archive | 2014

Method for cutting silicon chip with hollow film structures

Lu Dike; Jiao Binbin; Zhu Encheng; Fu Qiangsheng; Fan Zixiang; Kong Yanmei; Liu Ruiwen


Archive | 2013

Wet releasing method for silicon-based MEMS device by using KOH solution

Shang Haiping; Jiao Binbin; Lu Dike; Li Zhigang; Liu Ruiwen; Chen Dapeng


Archive | 2013

Auto-rotating device for vacuum cavities

Lu Dike; Jiao Binbin; Li Zhigang; Shang Haiping; Kong Yanmei


Archive | 2013

Manufacturing method for stress-matching bimaterial microcantilever

Shang Haiping; Jiao Binbin; Liu Ruiwen; Chen Dapeng; Li Zhigang; Lu Dike


Archive | 2013

Making method of tensile stress LPCVD SiO2 membrane

Shang Haiping; Jiao Binbin; Liu Ruiwen; Chen Dapeng; Li Zhigang; Lu Dike


Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems | 2015

The thermal-mechanical performance of the uncooled infrared optical-readout bi-material FPA

Kong Yanmei; Liu Ruiwen; Jiao Binbin; Lu Dike; Zhu Encheng; Fu Qiangsheng; Chen Dapeng

Collaboration


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Jiao Binbin

Chinese Academy of Sciences

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Li Zhigang

Chinese Academy of Sciences

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Chen Dapeng

Chinese Academy of Sciences

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Liu Ruiwen

Chinese Academy of Sciences

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Kong Yanmei

Chinese Academy of Sciences

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Shang Haiping

Chinese Academy of Sciences

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Gao Chaoqun

Chinese Academy of Sciences

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Liu Gang

Northwestern Polytechnical University

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Liu Rmwen

Chinese Academy of Sciences

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Ou Wen

Chinese Academy of Sciences

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