Lynn F. Fuller

A new program at RIT: master of engineering in microelectronics manufacturing engineering

Rochester Institute of Technology, College of Engineering, has established a new master of engineering degree program in microelectronics manufacturing engineering. The program is one year (four quarters) in duration and is designed for BS graduates in engineering or science. The core courses are Microelectronics I, II, III, Microlithography I, II, and Manufacturing Science I, II. Concentration courses may be selected from a list of courses including computer integrated manufacturing, statistical design of experiments, facilities design, safety, and others. The core courses are discussed, and the facilities are described.<<ETX>>

Bulk micromachined pressure sensor

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

Care and feeding of a university cleanroom facility

The authors describe the systems that have been established for the operation of the microelectronics facility at the Rochester Institute of Technology. Attention is given to the organizational structure; support facilities; cleanroom maintenance; lab equipment; equipment operation; lab supplies, inventory, and control; lab safety; and the hazardous waste program.<<ETX>>

A Thermally Actuated Microelectromechanical (MEMS) Device For Measuring Viscosity

A thermally actuated non-cantilever-beam microelectromechanical viscosity sensor is presented. The proposed device is based on thermally induced vibrations of a simple silicon diaphragm and its damping due to the surrounding fluid. This vibration viscometer device utilizes thermal actuation through an in situ resistive heater and piezoresistive sensing, both of which utilize CMOS compatible materials leading to an inexpensive and reliable system. Thermal analysis was performed utilizing temperature diodes in the silicon diaphragm to determine the minimum heater voltage pulse amplitude and time in order to prevent heat loss to the oil under test that would lead to local viscosity changes. Viscosity measurements were performed and compared to motor oil measured on a commercial cone-and-plate viscometer.

A cost analysis of operating a large integrated circuit laboratory at Rochester Institute of Technology

Rochester Institute of Technology (RIT) has been operating a large integrated circuit laboratory for over four years. Approximately

A surface micromachined capacitive pressure sensor for biomedical applications

750000 per year is donated equipment and supplies from industry, leaving a cost of

Microelectronic engineering at RIT-10 years of industry partnership

315000 per year for operating this facility. Approximately

A joint industry-university CIM project for university microelectronics manufacturing

100000 per year is available from RIT funds the remaining

Implementation of a CIM system for semiconductor manufacturing at Rochester Institute of Technology

215000 is raised by an industrial associates program. Twenty one companies each donate

An Electromagnetic MEMS Actuator for Micropumps

10000 per year for these operating expenses. These companies include some of the affiliate companies who are beyond the first three-year commitment as well as other companies interested in supporting the microelectronic engineering program at RIT.<<ETX>>