Magdalena Moczała

Scanning probe microscopy investigations of the electrical properties of chemical vapor deposited graphene grown on a 6H-SiC substrate

Sublimated graphene grown on SiC is an attractive material for scientific investigations. Nevertheless the self limiting process on the Si face and its sensitivity to the surface quality of the SiC substrates may be unfavourable for later microelectronic processes. On the other hand, chemical vapor deposited (CVD) graphene does not posses such disadvantages, so further experimental investigation is needed. In this paper CVD grown graphene on 6H-SiC (0001) substrate was investigated using scanning probe microscopy (SPM). Electrical properties of graphene were characterized with the use of: scanning tunnelling microscopy, conductive atomic force microscopy (C-AFM) with locally performed C-AFM current-voltage measurements and Kelvin probe force microscopy (KPFM). Based on the contact potential difference data from the KPFM measurements, the work function of graphene was estimated. We observed conductance variations not only on structural edges, existing surface corrugations or accidental bilayers, but also on a flat graphene surface.

Metrology of electromagnetic static actuation of MEMS microbridge using atomic force microscopy.

The objective of this paper is to describe application of atomic force microscopy (AFM) for characterization and calibration of static deflection of electromagnetically and/or thermally actuated micro-electromechanical (MEMS) bridge. The investigated MEMS structure is formed by a silicon nitride bridge and a thin film metal path enabling electromagnetic and/or thermal deflection actuation. We present how static microbridge deflection can be measured using contact mode AFM technology with resolution of 0.05nm in the range of up to tens of nm. We also analyze, for very small structure deflections and under defined and controlled load force varied in the range up to ca. 32nN, properties of thermal and electromagnetical microbridge deflection actuation schemes.

Silicon nanowires reliability and robustness investigation using AFM-based techniques

Silicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied investigation methodology and reports measurement results aggregated during series of AFM-based tests.

Microcontact printing technology as a method of fabrication of patterned self-assembled monolayers for application in nanometrology

This paper is focused on manufacture technology of molecular self-assembled monolayers (SAM) using microcontact printing (μCP) techniqe. This technique, due to its low-cost and simplicity, is a very attractive one for further development of molecular electronics and nanotechnology. The SAM can be produced on gold or silicon oxide using thiol and silane based chemistry respectively[1]. The μCP techniques allow the imposition of molecular structures in specific areas. The chemical properties of the fabricated layers depend on the functional groups of tail molecules. Such structures can be used as chemical receptors or as interface between the substrate and the biosensor receptors [2]. Architecture of the tail molecule determines the chemical reactivity and hydrophilic or hydrophobic properties. In addition it modifies the tribological properties [4] and electrical structure parameters, such as contact potential diference (CPD) [5]. The height of the SAM structure containing carbon chain is highly dependent on the length and type of binding molecules to the substrate, which enables application of the μCP SAM structures in height metrology. The results of these studies will be presented in the work.

Fabrication and measurement of micromechanical bridge structures for mass change detection

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are the promising platforms for mass change observations. These systems in optimal solutions allow to observe the deposition of single molecules. This is achieved by the structure miniaturization which entails increase of resolution. In this paper, we present fabrication process of silicon nitride double-clamped beam structures. Moreover, it is presented the basic description of the beam mechanics which is based on the Euler-Bernoulli beam theory. Additionally results of the measurements of the fabricated devices are shown. Thanks to the possibility of recording force curves at nanometer deflections using atomic force microscopy (AFM) system there is a possibility to determine the properties of the MEMS and/or NEMS devices. The obtained experimental results show that the parameters of the fabricated structures differ basing on the theoretical ones, which were calculated from the elasticity theory. This results from the stress in the silicon nitride film, which forms the elastic beam structure and from the stress in the metallization deposited on the bridge. The influence of the described factors on the bridge structure properties is also described. Bridge structures with thickness of 120 nm, width and length ranging from 3 to 10 μm and from 20 μm to 80 μm respectively were investigated.