Manuel A. Hernandez
Applied Materials
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Publication
Featured researches published by Manuel A. Hernandez.
advanced semiconductor manufacturing conference | 2010
T. Mandrekar; Manuel A. Hernandez; J. Hua; V. Ton; A. Bhatnagar; S. Mehta; Shankar Venkataraman
Applicability of SACVD for doping of 3-D structures was assessed on both flat substrates as well as patterned structures focusing on the optimization of dopant profile within the SACVD film. Boron and phosphorous doped ultra-shallow junctions of 6 and 10nm respectively are obtained with surface concentration in excess of 1E21 at/cc for this intrinsically conformal and damage-free technique
Archive | 2010
Tushar Mandrekar; Shankar Venkataraman; Zhong Qiang Hua; Manuel A. Hernandez
Archive | 2002
Alexander T. Schwarm; Arulkumar Shanmugasundram; Rong Pan; Manuel A. Hernandez; Amna Mohammad
Archive | 2008
Dmitry Lubomirsky; Toan Q. Tran; Lun Tsuei; Manuel A. Hernandez; Kirby H. Floyd; Ellie Yieh
Archive | 2009
Shankar Venkataraman; Hiroshi Hamana; Manuel A. Hernandez; Nitin K. Ingle; Paul Edward Gee
Archive | 2009
Kimberly Hinckley; Yizhen Zhang; Manuel A. Hernandez; Won B. Bang; Dmitry Lubomirsky
Archive | 2011
Zhong Qiang Hua; Manuel A. Hernandez; Lei Luo; Kedar Sapre
Archive | 2001
Scott Brad Herner; Manuel A. Hernandez
Archive | 2010
Zhong Qiang Hua; Lei Luo; Manuel A. Hernandez; Shankar Venkataraman
Archive | 2012
Kedar Sapre; Manuel A. Hernandez; Lei Luo
