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Marc Michael Kollrack

Applied Materials

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Publication

Featured researches published by Marc Michael Kollrack.

Archive | 1994

Plasma CVD of silicon nitride thin films on large area glass substrates at high deposition rates

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1993

Method for multilayer CVD processing in a single chamber

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1993

Method of limiting sticking of body to susceptor in a deposition treatment

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Kam S. Law; Dan Maydan

Archive | 1994

Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1994

Method of plasma chemical vapor deposition of layer with improved interface

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Takako Takehara; Guofu Jeff Feng; Robert Connolly; Kam S. Law; Dan Maydan

Archive | 1994

Method of limiting sticking of a body on the support at a deposition treatment

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Kam S. Law; Dan Maydan

Archive | 1994

Verfahren zur Begrenzung des Haftens eines Körpers am Träger bei einer Abscheidungs-Behandlung A method of limiting sticking of a body on the support at a deposition treatment

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Kam S. Law; Dan Maydan

Archive | 1994

Procédé pour le plasma-dépôt chimique en phase vapeur de souches ayant une interface améliorée

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Takako Takehara; Guofu Jeff Feng; Robert Connolly; Kam S. Law; Dan Maydan

Archive | 1994

A method for plasma enhanced chemical vapor deposition of layers from the vapor phase to improve the interfacial

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Takako Takehara; Guofu Jeff Feng; Robert Connolly; Kam S. Law; Dan Maydan

Archive | 1993

Verfahren zur CVD-Beschichtung einer Mehrschichtstruktur in einer einzigen Kammer A process for the CVD coating of a multilayer structure in a single chamber

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

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Kam S. Law

Applied Materials

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Robert Robertson

Applied Materials

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Dan Maydan

Bell Labs

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Angela Lee

Applied Materials

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Angela T. Lee

Applied Materials

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Pamela Lou

Applied Materials

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Dan Maydan

Bell Labs

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Guofu Jeff Feng

Applied Materials

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Takako Takehara

Applied Materials

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