Angela Lee | Researchain

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Featured researches published by Angela Lee.

Archive | 1994

Plasma CVD of silicon nitride thin films on large area glass substrates at high deposition rates

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1993

Method for multilayer CVD processing in a single chamber

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1994

Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 2001

Gas reactions to eliminate contaminates in a CVD chamber

Jeff Feng; Mike Kollrack; Kam S. Law; Angela Lee; Robert Robertson; Quanyuan Shang; Takako Takehara

Archive | 2001

Methods for improving chemical vapor deposition processing

Jeff Feng; Mike Kollrack; Kam S. Law; Angela Lee; Robert Robertson; Quanyuan Shang; Takako Takehara

Archive | 2002

Method of conditioning cvd chamber after cleaning thereof

Guofu Jeff Feng; Michael Kollrack; Kam S. Law; Angela Lee; Robert Robertson; Quanyuan Shang; Takako Takehara; リーアンジェラ; エス．ロウカム; シャンクァンユァン; ジェフフェンゴォフ; タケハラタカコ; コルラックマイケル; ロバートソンロバート

Archive | 2002