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Robert Robertson

Applied Materials

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Publication

Featured researches published by Robert Robertson.

Archive | 1992

Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity

Kurt kwok; Robert Robertson

Archive | 1993

Method and apparatus for protection of conductive surfaces in a plasma processing reactor

Robert Robertson; Kam S. Law; John M. White

Archive | 1997

Dual frequency excitation of plasma for film deposition

Kam S. Law; Robert Robertson; Quanyuan Shang; Jeff Olsen; Carl Sorensen

Archive | 1997

Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology

Quanyuan Shang; Robert Robertson; Kam S. Law; Dan Maydan

Archive | 1995

Single chamber CVD process for thin film transistors

Kam S. Law; Robert Robertson; Guofu Jeff Feng

Archive | 1994

Plasma CVD of silicon nitride thin films on large area glass substrates at high deposition rates

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1993

Method for multilayer CVD processing in a single chamber

Kam S. Law; Robert Robertson; Pamela Lou; Marc Michael Kollrack; Angela Lee; Dan Maydan

Archive | 1999

Film deposition using a finger type shadow frame

Tae Kyung Won; Quanyuan Shang; Robert Robertson; Soo Young Choi; Kam S. Law; Robert I. Greene; John M. White

Archive | 1993

Method of limiting sticking of body to susceptor in a deposition treatment

Robert Robertson; Marc Michael Kollrack; Angela T. Lee; Kam S. Law; Dan Maydan

Archive | 1996

Deposition of high quality conformal silicon oxide thin films for the manufacture of thin film transistors

Kam S. Law; Robert Robertson; Jeffrey Feng

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Kam S. Law

Applied Materials

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Takako Takehara

Applied Materials

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Quanyuan Shang

Applied Materials

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Angela Lee

Applied Materials

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Marc Michael Kollrack

Applied Materials

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Dan Maydan

Bell Labs

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Guofu Jeff Feng

Applied Materials

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Angela T. Lee

Applied Materials

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Pamela Lou

Applied Materials

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Jeff Feng

Applied Materials

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