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Dive into the research topics where Marc Probst is active.

Publication


Featured researches published by Marc Probst.


Archive | 2009

Method and device including transistor component having a field electrode

Joachim Krumrey; Gerhard Noebauer; Martin Poelzl; Marc Probst


Archive | 2011

Method of fabricating isolated semiconductor structures

Thoralf Kautzsch; Boris Binder; Torsten Helm; Stefan Kolb; Marc Probst; Uwe Rudolph


Archive | 2010

Transistorbauelement mit einer Feldelektrode

Joachim Krumrey; Gerhard Nöbauer; Martin Pölzl; Marc Probst


Planarization / CMP Technology (ICPT), 2007 International Conference on | 2011

Integrative Defect Density Reduction at STI CMP

Ralf Becker; Wolfgang Tittes; Andreas Boenicke; Stefan Peters; Marc Probst; Daniel Schulze; Sebastian Cwikla; Stefan Loesch


Archive | 2011

Method of fabricating isolating semiconductor structures using a layout of trenches and openings

Thoralf Kautzsch; Boris Binder; Torsten Helm; Stefan Kolb; Marc Probst; Uwe Rudolph


Archive | 2017

Integrated circuit and method of forming an integrated circuit

Torstern Helm; Marc Probst; Uwe Rudolph


Archive | 2016

BiMOS-Vorrichtung mit einem vollständig selbstausgerichteten Emittersilicium und Verfahren zu deren Herstellung

Dirk Manger; Stefan Tegen; Andreas Pribil; Frank Hoffmann; Marc Probst


Archive | 2016

BiMOS DEVICE WITH A FULLY SELF-ALIGNED EMITTER-SILICON AND METHOD FOR MANUFACTURING THE SAME

Frank Hoffmann; Dirk Manger; Andreas Pribil; Marc Probst; Stefan Tegen


Archive | 2016

BiMOS device with fully self-aligned emitter-silicon and fabrication method thereof

Frank Hoffmann; Stefan Tegen; Andreas Pribil; Dirk Manger; Marc Probst


Archive | 2015

METHOD OF FABRICATING ISOLATING SEMICONDUCTOR STRUCTURES

Thoralf Kautzsch; Boris Binder; Torsten Helm; Stefan Kolb; Marc Probst; Uwe Rudolph

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