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Featured researches published by Patrick Wellner.


international multi-conference on systems, signals and devices | 2012

Modal analysis of MEMS using ultrasonic base excitation

Steven Kehrberg; Patrick Wellner; Carsten Geckeler; Jan Mehner

We developed a new test facility based on the principle of piezoelectric base excitation in order to meet the requirements for modal analysis of a micromachined angular rate sensor at very high frequencies. A combination of a 0.5 mm thin piezoelectric disc, a seismic mass and a damping element mounted in a vacuum chamber results in a linear frequency response over the whole frequency range from 10 to 200 kHz. Therefore the test facility is particularly suitable for the analysis of mechanical nonlinearities of microelectromechanical systems (MEMS).


Archive | 2013

HYBRID INTEGRATED COMPONENT

Johannes Classen; Axel Franke; Jens Frey; Heribert Weber; Frank Fischer; Patrick Wellner; Mirko Hattass; Daniel Christoph Meisel


Archive | 2009

Acceleration sensor and method for its manufacture

Johannes Classen; Arnd Kaelberer; Patrick Wellner; Dietrich Schubert; Lars Tebje


Archive | 2013

Method for manufacturing a cap for a mems component, and hybrid integrated component having such a cap

Johannes Classen; Axel Franke; Jens Frey; Heribert Weber; Frank Fischer; Patrick Wellner


Archive | 2007

Electrical appliance with lubricated joint has at least one joint position with first joint partner, especially sleeve, and second joint partner, especially pin, whereby joint position has joint between two joint partners

Eric Ochs; Ronny Ludwig; Florian Grabmaier; Stephan Henzler; Rainer Straub; Christian Voehringer; Patrick Wellner


Archive | 2013

Acceleration sensor has detection unit, which is coupled with seismic mass such that amplitude of deflection movement along direction of deflection is greater than amplitude of detecting motion along direction of detection

Dietrich Schubert; Harald Emmerich; Rolf Kaack; Patrick Wellner


Archive | 2011

Micromechanical system including a suspension and an electrode positioned movably

Johannes Classen; Arnd Kaelberer; Patrick Wellner; Dietrich Schubert; Lars Tebje


Archive | 2013

Hybrid intergrated component and method for the manufacture thereof

Axel Franke; Patrick Wellner; Lars Tebje


Archive | 2010

Capacitive acceleration sensor for detecting acceleration in z-direction at substrate plane of luffing structure, has substrate fingers connected with substrate, where one of fingers has conductive electrodes insulated from each other

Johannes Classen; Arnd Kaelberer; Patrick Wellner; Dietrich Schubert; Lars Tebje


Archive | 2009

Sensor and method for the production of a sensor

Patrick Wellner; Christian Patak; Lars Tebje; Helmut Grutzeck; Volker Materna

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