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Markus Kirchhoff

Infineon Technologies

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Publication

Featured researches published by Markus Kirchhoff.

Archive | 2001

Method for forming an insulator having a low dielectric constant on a semiconductor substrate

Markus Kirchhoff

Archive | 2002

Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process

Guenther Czech; Carsten Fuelber; Markus Kirchhoff; Maik Stegemann; Mirko Vogt; Stephan Wege

Archive | 2001

Method for forming a trench in a semiconductor substrate

Markus Kirchhoff

Archive | 2002

Method for filling trenches in integrated semiconductor circuits

Markus Kirchhoff; Martin Schrems

Archive | 2005

Method for production of a semiconductor structure

Oliver Genz; Markus Kirchhoff; Stephan Machill; Alexander Reb; Barbara Schmidt; Momtchil Stavrev; Maik Stegemann; Stephan Wege

Archive | 2002

Method for fabricating an integrated semiconductor circuit to prevent formation of voids

Markus Kirchhoff

Archive | 2002

Method for photolithographic structuring by means of a carbon hard mask layer which has a diamond-like hardness and is deposited by means of a plasma method

Guenther Czech; Carsten Fuelber; Markus Kirchhoff; Maik Stegemann; Mirko Vogt; Stephan Wege

Archive | 2000

Contact hole forming method for semiconductor arrangement forming and structuring masking layers on dielectric layer and strip conductor and forming adjustable contact hole

Markus Kirchhoff; Peter Lahnor; Stephan Wege

Archive | 2002

Photolithographic method for forming a structure in a semiconductor substrate

Markus Kirchhoff; Mirko Vogt; Stephan Wege; Frank Katzwinkel

Archive | 2000

Production of an insulator used in electronic circuits comprises forming a first conducting pathway and a second conducting pathway on a semiconductor substrate using conducting silicon

Markus Kirchhoff

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Collaboration

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Stephan Wege

Infineon Technologies

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Mirko Vogt

Infineon Technologies

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Maik Stegemann

Infineon Technologies

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Carsten Fuelber

Infineon Technologies

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Guenther Czech

Siemens

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Frank Katzwinkel

Infineon Technologies

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Alexander Reb

Infineon Technologies

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Barbara Schmidt

Infineon Technologies

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Hans Glawischnig

Infineon Technologies

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Hans-Peter Sperlich

Infineon Technologies

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