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Hans-Peter Sperlich

Infineon Technologies

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Publication

Featured researches published by Hans-Peter Sperlich.

Archive | 2005

Method for structuring metal by means of a carbon mask

Hans-Peter Sperlich; Lothar Brencher; Jens Bachmann

Archive | 2005

Fabrication method for a semiconductor structure

Moritz Haupt; Andreas Klipp; Hans-Peter Sperlich; Momtchill Stavrev; Stephan Wege

Archive | 2000

Method for fabricating an isolation trench using an auxiliary layer

Hans-Peter Sperlich; Jens Zimmermann

Archive | 2006

Making insulation trench in semiconductor structure, first forms etching step between filling oxide and oxide layer coating

Jörg Radecker; Florian Schmitt; Hans-Peter Sperlich

Archive | 2005

Production process for a semiconductor structure in shallow trench isolation forms oxide layer between trench and spin on glass filling and thermally cures

Albert Birner; Andreas Weber; Andreas Klipp; Uwe Wellhausen; Hans-Peter Sperlich

Archive | 2005

Production of semiconductor structure for integrated circuits comprises forming semiconductor substrate with a trench, depositing germanium-containing silicate glass to fill trench, melting silicate glass, and optionally back-polishing

Hans-Peter Sperlich; Stephan Hartmann

Archive | 2005

Plane spin-on-layer production for use on semiconductor wafer, involves superimposing liner layer on semiconductor structure before superimposition of spin-on-layer, where structure supports planar superimposition of layer on it

Albert Birner; Arabinda Das; Henry Heidemeyer; Mark Hollatz; Andreas Klipp; Hans-Peter Sperlich; Uwe Wellhausen

Archive | 2004

A method for producing an isolation trench in a semiconductor structure

Jörg Radecker; Florian Schmitt; Hans-Peter Sperlich

Archive | 2004

Verfahren zur Metallstrukturierung

Hans-Peter Sperlich; Lothar Brencher; Jens Bachmann

Archive | 2004

Filling irregularities and intermediate cavities during surface structuring on semiconductor, employs flow-fill process using filler of low dielectric constant

Andreas Klipp; Hans-Peter Sperlich

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Collaboration

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Jörg Radecker

Infineon Technologies

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Andreas Klipp

Infineon Technologies

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Jens Bachmann

Infineon Technologies

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Lothar Brencher

Infineon Technologies

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Stephan Wege

Infineon Technologies

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Hans Glawischnig

Infineon Technologies

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Markus Kirchhoff

Infineon Technologies

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Oswald Spindler

Infineon Technologies

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Ryan O'riain

Infineon Technologies

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Stephan Hartmann

Infineon Technologies

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