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Martin A. Hilkene

Applied Materials

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Publication

Featured researches published by Martin A. Hilkene.

Archive | 2010

Chamber for processing hard disk drive substrates

Majeed A. Foad; Martin A. Hilkene; Peter I. Porshnev; Jose-Antonio Marin; Matthew D. Scotney-Castle

Archive | 2009

PLASMA IMMERSION ION IMPLANTATION PROCESS WITH CHAMBER SEASONING AND SEASONING LAYER PLASMA DISCHARGING FOR WAFER DECHUCKING

Manoj Vellaikal; Kartik Santhanam; Yen B. Ta; Martin A. Hilkene; Matthew D. Scotney-Castle; Canfeng Lai; Peter I. Porshnev; Majeed A. Foad

Archive | 2007

Removal of surface dopants from a substrate

Kartik Ramaswamy; Kenneth S. Collins; Biagio Gallo; Hiroji Hanawa; Majeed A. Foad; Martin A. Hilkene; Kartik Santhanam; Matthew D. Scotney-Castle

Archive | 2010

Method for removing implanted photo resist from hard disk drive substrates

Martin A. Hilkene; Majeed A. Foad; Matthew D. Scotney-Castle; Roman Gouk; Steven Verhaverbeke; Peter I. Porshnev

Archive | 2010

Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications

Martin A. Hilkene; Matthew D. Scotney-Castle; Peter I. Porshnev; Roman Gouk; Steven Verhaverbeke

Archive | 2010

Plasma ion implantation process for patterned disc media applications

Martin A. Hilkene; Matthew D. Scotney-Castle; Roman Gouk; Steven Verhaverbeke

Archive | 2014

Plasma Doping Of Silicon-Containing Films

Victor Nguyen; Mihaela Balseanu; Li-Qun Xia; Ning Li; Martin A. Hilkene; Matthew D. Scotney-Castle

Archive | 2011

Resist fortification for magnetic media patterning

Christopher Dennis Bencher; Roman Gouk; Steven Verhaverbeke; Li-Qun Xia; Yong-Won Lee; Matthew D. Scotney-Castle; Martin A. Hilkene; Peter I. Porshnev

Archive | 2012

Methods and apparatus for conformal doping

Kartik Santhanam; Martin A. Hilkene; Manoj Vellaikal; Mark Lee; Matthew D. Scotney-Castle; Peter I. Porshnev

Archive | 2010

Methods for substrate surface planarization during magnetic patterning by plasma immersion ion implantation

Roman Gouk; Steven Verhaverbeke; Matthew D. Scotney-Castle; Martin A. Hilkene

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Matthew D. Scotney-Castle

Applied Materials

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Peter I. Porshnev

Applied Materials

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Kartik Santhanam

Applied Materials

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Majeed A. Foad

Applied Materials

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Roman Gouk

Applied Materials

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Manoj Vellaikal

Applied Materials

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Steven Verhaverbeke

Applied Materials

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Ludovic Godet

Applied Materials

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Yen B. Ta

Applied Materials

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Canfeng Lai

Applied Materials

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