Peter I. Porshnev
Applied Materials
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Publication
Featured researches published by Peter I. Porshnev.
ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation#N#Technology | 2008
C. Ortolland; Naoto Horiguchi; C. Kerner; T. Chiarella; Pierre Eyben; Jean-Luc Everaert; Jose Ignacio del Agua Borniquel; Tze Poon; Kartik Santhanam; Peter I. Porshnev; Majeed A. Foad; R. Schreutelkamp; Philippe Absil; Wilfried Vandervorst; Susan Felch; Thomas Hoffmann
A study of doping the pMOS Lightly Doped Drain (LDD) by Plasma Immersion Ion Implantation (P3i) with BF3 is presented which demonstrates a better transistor performance compared to standard beam line Ion Implantation (I/I). The benefit of P3i comes from the broad angular distribution of the impinging ions thereby doping the poly‐silicon gate sidewall as well. Gate capacitance of short channel devices has been measured and clearly shows this improvement. This model is clearly supported by high resolution 2D‐carrier profiles using Scanning Spreading Resistance Microscopy (SSRM) which shows this gate sidewall doping. The broad angular distribution also implies a smaller directional sensitivity (to for instance the detailed gate edge shape) and leads to devices which are perfectly balanced, when Source and Drain electrode are switched.
Archive | 2002
Shamouil Shamouilian; Canfeng Lai; Michael S. Cox; Padmanabhan Krishnaraj; Tsutomu Tanaka; Sebastien Raoux; Peter I. Porshnev; Thomas Nowak
Archive | 2003
Peter I. Porshnev; Sebastien Raoux; Mike Woolston; Christopher L. Aardahl; Rick J. Orth; Kenneth G. Rappe
Archive | 2002
Arnold Kholodenko; Peter I. Porshnev
Archive | 2010
Majeed A. Foad; Martin A. Hilkene; Peter I. Porshnev; Jose-Antonio Marin; Matthew D. Scotney-Castle
Archive | 2009
Manoj Vellaikal; Kartik Santhanam; Yen B. Ta; Martin A. Hilkene; Matthew D. Scotney-Castle; Canfeng Lai; Peter I. Porshnev; Majeed A. Foad
Archive | 2010
Martin A. Hilkene; Majeed A. Foad; Matthew D. Scotney-Castle; Roman Gouk; Steven Verhaverbeke; Peter I. Porshnev
Archive | 2007
Peter I. Porshnev; Mark W. Curry; Sebastien Raoux
Archive | 2007
Sebastien Raoux; Mark W. Curry; Peter I. Porshnev; Allen Fox
Archive | 2010
Martin A. Hilkene; Matthew D. Scotney-Castle; Peter I. Porshnev; Roman Gouk; Steven Verhaverbeke