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Canfeng Lai

Applied Materials

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Publication

Featured researches published by Canfeng Lai.

Archive | 2002

Toroidal plasma source for plasma processing

Michael S. Cox; Canfeng Lai; Robert B. Majewski; David Wanamaker; Christopher T. Lane; Peter K. Loewenhardt; Shamouil Shamouilian; John Parks

Archive | 2002

Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas

Shamouil Shamouilian; Canfeng Lai; Michael S. Cox; Padmanabhan Krishnaraj; Tsutomu Tanaka; Sebastien Raoux; Peter I. Porshnev; Thomas Nowak

Archive | 2004

Multi-core transformer plasma source

Canfeng Lai; Michael S. Cox; Peter K. Loewenhardt; Tsutomu Tanaka; Shamouil Shamouilian

Archive | 2005

In situ application of etch back for improved deposition into high-aspect-ratio features

Padmanabhan Krishnaraj; Pavel Ionov; Canfeng Lai; Michael S. Cox; Shamouil Shamouilian

Archive | 2000

Directing a flow of gas in a substrate processing chamber

Laxman Murugesh; Padmanaban Krishnaraj; Michael S. Cox; Canfeng Lai; Narendra Dubey; Tom K. Cho; Sudhir Gondhalekar; Lily L. Pang

Archive | 2001

Atmospheric substrate processing apparatus for depositing multiple layers on a substrate

Michael Barnes; Michael S. Cox; Canfeng Lai; John Parks

Archive | 2009

PLASMA IMMERSION ION IMPLANTATION PROCESS WITH CHAMBER SEASONING AND SEASONING LAYER PLASMA DISCHARGING FOR WAFER DECHUCKING

Manoj Vellaikal; Kartik Santhanam; Yen B. Ta; Martin A. Hilkene; Matthew D. Scotney-Castle; Canfeng Lai; Peter I. Porshnev; Majeed A. Foad

Archive | 2002

Chamber clean method using remote and in situ plasma cleaning systems

Zhenjiang Cui; Michael S. Cox; Canfeng Lai; Paddy Krishnaraj

Archive | 2002

Non-intrusive plasma probe

Michael S. Cox; Canfeng Lai; Qiwei Liang

Archive | 2002

Substrate support with extended radio frequency electrode upper surface

Sudhir Gondhalekar; Dongqing Li; Canfeng Lai; Zhengquan Tan; Steve H. Kim; Alexander Veyster

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Michael S. Cox

Applied Materials

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Lily L. Pang

Applied Materials

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Peter I. Porshnev

Applied Materials

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Shamouil Shamouilian

Applied Materials

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Jeffrey Tobin

Applied Materials

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Padmanabhan Krishnaraj

Applied Materials

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Sudhir Gondhalekar

Applied Materials

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John Parks

Applied Materials

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Lara Hawrylchak

Applied Materials

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Majeed A. Foad

Applied Materials

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