Masaaki Itou

Soft x-ray monochromator with a varied-space plane grating for synchrotron radiation: design and evaluation

A soft x-ray monochromator was developed for synchrotron radiation and installed at the Photon Factory in the National Laboratory for High Energy Physics. This monochromator consists of only two optical elements: a plane mirror and a varied-space plane grating with focusing properties. The 0.7-10-nm wavelength range can be covered with resolutions of 640 at 1.4 nm and 1200 at 5 nm. The output photon flux at wavelengths above 1 nm is ~10(10)-10(11) photons/s for a 100-mA beam current in the 1% spectral bandwidth.

A Grazing Incidence Monochromator With A Varied-Space Plane Grating For Synchrotron Radiation

A grazing incidence monochromator to scan the 5 - 100 Å wavelength range of synchrotron radiation is designed by taking advantage of the focusing property of a varied-space plane grating ruled with a numerically controlled ruling engine. The plane grating monochromator uses only two plane surfaces for reflection optics so that high throughput in the soft x-ray region is expected.

Mechanically ruled diffraction gratings for synchrotron radiation

Abstract Improvements in the ruling, replication, and measurement of mechanically ruled diffraction gratings, are described, especially for synchrotron radiation applications. Profiles of extremely fine and shallow grooves are measured with a scanning electron microscope. Replica gratings can now be baked for high vacuum applications using a high-temperature durable epoxy as cement. The groove space variation technology is effective for reducing aberrations in concave grating monochromators. A grazing incidence monochromator without using collimating and focusing mirrors has been designed and fabricated for a soft X-ray beamline at the Photon Factory by utilizing the advantage of a varied-space plane grating with self-focusing properties.

Ultraviolet/ozone cleaning of a soft x-ray grating contaminated by synchrotron radiation.

A grating which was carbon contaminated by synchrotron radiation was cleaned using UV/ozone asher, and soft x-ray reflectivity was recovered into the original level after cleaning.

Groove Profile Measurement Of Diffraction Gratings Using Scanning Electron Microscope

A method for measuring diffraction preting groove profiles using a scanning electron microscope is developed. The method is to observe a photoresist well that is straight and normal to the grating grooves. It is formed by using photolithography technology for seticonductor device fabrication. Several types of diffraction gratings are ruled by applying this measurement technology to help control the groove profiles, especially of those with extremely fine and shallow grooves.