Soichi Katagiri
Hitachi
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Publication
Featured researches published by Soichi Katagiri.
Applied Optics | 1991
Keiji Kataoka; Soichi Katagiri; Toshiei Kurosaki
A way to detect with high resolution the position of a wafer and a mask is proposed and evaluated. In this method, a grating mark on a wafer or a mask is detected by heterodyne interference using a He-Ne Zeeman laser. Experiments show that the position of a wafer or a mask could be detected with a resolution of approximately 0.01 microm.
Archive | 1991
Tsuneo Terasawa; Masaaki Itou; Shigeo Moriyama; Soichi Katagiri; Hiroshi Fukuda
Archive | 1998
Soichi Katagiri; Shigeo Moriyama; Kan Yasui; Katsuhiko Yamaguchi
Archive | 1993
Eiichi Seya; Massaaki Ito; Soichi Katagiri; Tsuneo Terasawa; Minoru Hidaka; Eiji Takeda; Norio Saitou
Archive | 1992
Tsuneo Terasawa; Katsunobu Hama; Soichi Katagiri
Archive | 1992
Soichi Katagiri; Shigeo Moriyama; Tsuneo Terasawa; Masaaki Itou
Archive | 1991
Soichi Katagiri; Shigeo Moriyama; Tsuneo Terasawa; Masaaki Itou
Archive | 1988
Keiji Kataoka; Toshiei Kurosaki; Seiji Yonezawa; Soichi Katagiri
Archive | 1991
Yasuhiro Yoshitake; Yoshitada Oshida; Soichi Katagiri; Shuji Sugiyama; Yoshimitsu Saze
Archive | 2002
Soichi Katagiri; Ui Yamaguchi; Seiichi Kondo; Kan Yasui; Masahiro Kaise; Minoru Honda
