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Masahiro Mase

Hitachi

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Publication

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Shinku | 1990

Turbo vacuum pump

Seiji Sakagami; Shinjiro Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1997

Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump

Seiji Sakagami; Masahiro Mase; Chiaki Urano; Shinji Koyano; Yuichi Kinoshita; Takashi Nagaoka

Archive | 1989

Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1987

Method for LPCVD of semiconductors using oil free vacuum pumps

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1987

Vacuum pump apparatus.

Takashi Nagaoka; Masahiro Mase; Ichiro Gyobu; Kazuhiko Ikemura

Archive | 1986

Vacuum pump with plural labyrinth seal portions

Minoru Taniyama; Masahiro Mase; Takashi Nagaoka

Archive | 1984

Cryogenic liquefied pump system

Seiichi Kikkawa; Hisanao Ogata; Yoshinori Hakuraku; Masahiro Mase; Nobuo Tsumaki; Yoshihisa Awada; Hiroki Kajiwara

Archive | 1984

Liquefied gas pump

Seiichi Kikkawa; Hisanao Ogata; Yoshinori Hakuraku; Masahiro Mase; Nobuo Tsumaki; Yoshihisa Awada; Hiroki Kajiwara

Shinku | 1990

The Analysis on the Performance for Radial Flow Impeller of Turbo Vacuum Pump in the Transient Flow

Takeshi Okawada; Masahiro Mase; Seiji Sakagami

Archive | 1989

Turbovakuumpumpe. Turbo vacuum pump.

Masahiro Mase; Seiji Sakagami; Takeshi Okawada; Shinjiroo Ueda; Yoshihisa Awada; Takashi Nagaoka

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Takashi Nagaoka

Hitachi

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Ichiro Gyobu

Hitachi

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Yoshihisa Awada

Hitachi

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Kimio Muramatsu

Hitachi

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Seiji Sakagami

Hitachi

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Shinjiroo Ueda

Hitachi

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Akihiko Satou

Hitachi

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Hiroaki Sakamoto

Hitachi

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Hiroki Kajiwara

Hitachi

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Hisanao Ogata

Hitachi

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