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Dive into the research topics where Shinjiroo Ueda is active.

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Featured researches published by Shinjiroo Ueda.


Archive | 1990

Synchrotron radiation source with beam stabilizers

Takashi Ikeguchi; Manabu Matsumoto; Shinjiroo Ueda; Tadasi Sonobe; Toru Murashita; Satoshi Ido; Kazuo Kuroichi; Akinori Shibayama


Archive | 1989

Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka


Archive | 1993

Charged particle beam apparatus including means for maintaining a vacuum seal

Hironobu Matsui; Mikio Ichihashi; Shinjiroo Ueda; Tadashi Otaka; Kazue Takahashi; Toshiaki Kobari; Kenji Odaka


Archive | 1991

Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems

Hironobu Matsui; Mikio Ichihashi; Shinjiroo Ueda; Tadashi Otaka; Kazue Takahashi; Toshiaki Kobari; Kenji Odaka


Archive | 1987

Method for LPCVD of semiconductors using oil free vacuum pumps

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka


Archive | 1990

METHOD OF AND APPARATUS FOR PRODUCING SUPERPURE NITROGEN

Shozi Koyama; Takazumi Ishizu; Junichi Hosokawa; Masahiro Yamazaki; Shinjiroo Ueda; Kanji Fujimori


Archive | 1988

Synchrotron radiation source

Manabu Matsumoto; Takashi Ikeguchi; Shinjiroo Ueda; Tadasi Sonobe; Toru Murashita; Satoshi Ido; Kazuo Kuroishi; Yoshiaki Kazawa; Shunji Kakiuchi; Toshiaki Kobari


Shinku | 1991

Outgassing Characteristics of Stainless Steel Chamber Covered with BN Precipitated Surface

Toshiaki Kobari; Shinjiroo Ueda; Osamu Satoh; Yasuhiko Ishida; Munenobu Suzuki; Akira Ebata; Toshihiko Fukui


Shinku | 1990

Outgassing rate of the stainless steel chamber after low temperature bakeout.

Toshiaki Kobari; Shinjiroo Ueda; Osamu Satoh; Manabu Matsumoto; Masanori Kobayashi; Youichirou Hori


Shinku | 1990

The Study of Sealing Characteristics of the Elastomer Seal

Muneo Furuse; Shinjiroo Ueda; Katsuaki Nagatomo; Tateo Okada

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