Shinjiroo Ueda | Researchain

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Archive | 1990

Synchrotron radiation source with beam stabilizers

Takashi Ikeguchi; Manabu Matsumoto; Shinjiroo Ueda; Tadasi Sonobe; Toru Murashita; Satoshi Ido; Kazuo Kuroichi; Akinori Shibayama

Archive | 1989

Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1993

Charged particle beam apparatus including means for maintaining a vacuum seal

Hironobu Matsui; Mikio Ichihashi; Shinjiroo Ueda; Tadashi Otaka; Kazue Takahashi; Toshiaki Kobari; Kenji Odaka

Archive | 1991

Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems

Hironobu Matsui; Mikio Ichihashi; Shinjiroo Ueda; Tadashi Otaka; Kazue Takahashi; Toshiaki Kobari; Kenji Odaka

Archive | 1987

Method for LPCVD of semiconductors using oil free vacuum pumps

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1990

METHOD OF AND APPARATUS FOR PRODUCING SUPERPURE NITROGEN

Shozi Koyama; Takazumi Ishizu; Junichi Hosokawa; Masahiro Yamazaki; Shinjiroo Ueda; Kanji Fujimori

Archive | 1988

Synchrotron radiation source

Manabu Matsumoto; Takashi Ikeguchi; Shinjiroo Ueda; Tadasi Sonobe; Toru Murashita; Satoshi Ido; Kazuo Kuroishi; Yoshiaki Kazawa; Shunji Kakiuchi; Toshiaki Kobari

Shinku | 1991