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Takashi Nagaoka

Hitachi

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Publication

Featured researches published by Takashi Nagaoka.

Shinku | 1990

Turbo vacuum pump

Seiji Sakagami; Shinjiro Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1997

Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump

Seiji Sakagami; Masahiro Mase; Chiaki Urano; Shinji Koyano; Yuichi Kinoshita; Takashi Nagaoka

Archive | 1989

Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1987

Method for LPCVD of semiconductors using oil free vacuum pumps

Akihiko Satou; Tadao Kusaka; Shigeo Tomiyama; Kouzi Aoki; Ichiro Gyobu; Kimio Muramatsu; Hiroaki Sakamoto; Shinjiroo Ueda; Masahiro Mase; Takashi Nagaoka

Archive | 1987

Vacuum pump apparatus.

Takashi Nagaoka; Masahiro Mase; Ichiro Gyobu; Kazuhiko Ikemura

Archive | 1986

Vacuum pump with plural labyrinth seal portions

Minoru Taniyama; Masahiro Mase; Takashi Nagaoka

Archive | 1983

Vane angle changing device for an axial fluid machine

Haruo Miura; Takashi Nagaoka; Yoshiaki Abe; Souji Sakata

Archive | 1986

MULTI-STAGE TYPE VACUUM PUMP

Kazuhiko Ikemura; Yukio Murata; Takashi Nagaoka; Ichiro Osakabe; Minoru Taniyama

Archive | 1989

Turbovakuumpumpe. Turbo vacuum pump.

Masahiro Mase; Seiji Sakagami; Takeshi Okawada; Shinjiroo Ueda; Yoshihisa Awada; Takashi Nagaoka

Archive | 1988

Apparatus for treatment of a process gas

Takashi Nagaoka; Ichiro Gyobu; Kimio Muramatsu; Keiji Ueyama; Masahiro Mase; Yoshihisa Awada; Akira Nishiuchi

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Masahiro Mase

Hitachi

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Ichiro Gyobu

Hitachi

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Kimio Muramatsu

Hitachi

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Yoshihisa Awada

Hitachi

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Kazuhiko Ikemura

Hitachi

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Minoru Taniyama

Hitachi

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Seiji Sakagami

Hitachi

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Shinjiroo Ueda

Hitachi

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Akihiko Satou

Hitachi

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Hiroaki Sakamoto

Hitachi

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