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Publication
Featured researches published by Masanobu Hatanaka.
international interconnect technology conference | 2011
Masanobu Hatanaka; Akihiro Shibata; Masamichi Harada; Satoru Toyoda; Michio Ishikawa; Koukou Suu
Dielectric films of ZrBO were grown using thermal-CVD Zr(BH4)4-O2 gas system. Oxygen gas was activated by microwave to produce its radical. The grown film showed high barrier properties for Cu diffusion with a thickness of 50 nm. Typical side step coverage was over 60% for a 45-µm-deep and 7.5-aspect-ratio TSV with a high coverage of 67% at the bottom. We report ZrBO-CVD mechanism related to the coverage.
Archive | 2008
Masanobu Hatanaka; Michio Ishikawa; Se-Ju Lim; Fumio Nakamura
Applied Surface Science | 2009
Mayumi B. Takeyama; Atsushi Noya; Yasuo Nakadai; Shozo Kambara; Masanobu Hatanaka; Yuichiro Hayasaka; Eiji Aoyagi; Hideaki Machida; Kazuya Masu
Archive | 2005
Masanobu Hatanaka; Michio Ishikawa; Se-Ju Lim; Fumio Nakamura
Archive | 2008
Masanobu Hatanaka; Kanako Tsumagari; Michio Ishikawa
Archive | 2006
Masanobu Hatanaka; Yoshikazu Takahashi; Michio Ishikawa; Fumio Nakamura
Archive | 2007
Masanobu Hatanaka; Michio Ishikawa; Kanako Tsumagari
The Japan Society of Applied Physics | 2003
Manabu Sakamoto; Tomoharu Aoki; Kazuya Masu; Se Ju Lim; Masanobu Hatanaka; Michio Ishikawa; Yuji Furumura
Archive | 1991
Atsuhiro Tsukune; Yuji Furumura; Masanobu Hatanaka
Archive | 1991
Atsuhiro Tsukune; Yuji Furumura; Masanobu Hatanaka
