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Kazuya Masu

Canon Inc.

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Publication

Featured researches published by Kazuya Masu.

Archive | 1990

Process for forming deposited film by use of alkyl aluminum hydride

Nobuo Mikoshiba; Kazuo Tsubouchi; Kazuya Masu

Archive | 1995

Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation

Nobuo Mikoshiba; Kazuo Tsubouchi; Kazuya Masu

Archive | 1990

Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride

Nobuo Mikoshiba; Kazuo Tsubouchi; Kazuya Masu

Archive | 1995

Process for forming deposited film

Nobuo Mikoshiba; Tadahiro Ohmi; Kazuo Tsubouchi; Kazuya Masu; Nobumasa Suzuki

Archive | 1992

Apparatus for vaporizing liquid raw material and apparatus for forming thin film

Kazuo Tsubouchi; Kazuya Masu

Archive | 1991

Metal film forming method

Kazuo Tsubouchi; Kazuya Masu

Archive | 1990

Plasma CVD of aluminum films

Nobuo Mikoshiba; Kazuo Tsubouchi; Kazuya Masu

Archive | 1992

Process for non-selectively forming deposition film on a non-electron-donative surface

Kazuo Tsubouchi; Kazuya Masu

Archive | 1995

Process for thin film formation

Kazuo Tsubouchi; Kazuya Masu

Archive | 1992

Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride

Nobuo Mikoshiba; Kazuo Tsubouchi; Kazuya Masu

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Kazuo Tsubouchi

Tohoku University

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Nobuo Mikoshiba

Canon Inc.

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Tadahiro Ohmi

Canon Inc.

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Hideki Matsuhashi

Tohoku University

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Tomohiko Shibata

University of Tsukuba

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Yohei Hiura

Tohoku University

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Nobumasa Suzuki

Canon Inc.

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