Matthew L. Miller | Researchain

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Featured researches published by Matthew L. Miller.

Archive | 2006

Capacitively coupled plasma reactor with magnetic plasma control

Daniel J. Hoffman; Matthew L. Miller; Jang Gyoo Yang; Heeyeop Chae; Michael Barnes; Tetsuya Ishikawa; Yan Ye

Archive | 2001

MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression

Daniel J. Hoffman; Yan Ye; Dan Katz; Douglas A. Buchberger; Xiaoye Zhao; Kang-Lie Chiang; Robert B. Hagen; Matthew L. Miller

Archive | 2010

Flow control features of cvd chambers

Kien N. Chuc; Qiwei Liang; Hanh D. Nguyen; Matthew L. Miller; Soonam Park; Toan Q. Tran; Adib Khan; Jang-Gyoo Yang; Dmitry Lubomirsky; Shankar Venkataraman

Archive | 2002

Capacitively coupled plasma reactor with uniform radial distribution of plasma

Jang Gyoo Yang; Daniel J. Hoffman; James D. Carducci; Douglas A. Buchberger; Matthew L. Miller; Kang-Lie Chiang; Gerardo A. Delgadino; Robert B. Hagen

Archive | 2011

Semiconductor processing system and methods using capacitively coupled plasma

Jang-Gyoo Yang; Matthew L. Miller; Kien N. Chuc; Qiwei Liang; Shankar Venkataraman; Dmitry Lubomirsky

Archive | 2008

Method of plasma load impedance tuning by modulation of an unmatched low power RF generator

Steven Shannon; Kartik Ramaswamy; Daniel J. Hoffman; Matthew L. Miller; Kenneth S. Collins

Archive | 2010

Dielectric film formation using inert gas excitation

Matthew L. Miller; Jang-Gyoo Yang

Archive | 2008

Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of an unmatched low power rf generator

Steven Shannon; Kartik Ramaswamy; Daniel J. Hoffman; Matthew L. Miller; Kenneth S. Collins

Archive | 2001

Inductive antenna for a plasma reactor producing reduced fluorine dissociation

Shiang-Bau Wang; Daniel J. Hoffman; Chunshi Cui; Yan Ye; Gerardo A. Delgadino; David McParland; Matthew L. Miller; Douglas A. Buchberger; Steven Shannon

Archive | 2008