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Matthew T. Tiersch

IBM

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Publication

Featured researches published by Matthew T. Tiersch.

Archive | 1997

Composite polish pad for CMP

Jose L. Cruz; Steven James Messier; Douglas Keith Sturtevant; Matthew T. Tiersch

Archive | 1997

Off-center grooved polish pad for CMP

Timothy C. Krywanczyk; Douglas Keith Sturtevant; Matthew T. Tiersch

Archive | 1997

CMP wafer carrier for preferential polishing of a wafer

Daniel D. Desorcie; Richard J. Lebel; Charles A. McKinney; Rock Nadeau; Timothy J. Rickard; Paul H. Smith; Douglas Keith Sturtevant; Matthew T. Tiersch

Archive | 2001

Chemical mechanical polishing slurry and method for polishing metal/oxide layers

Paul M. Feeney; Timothy C. Krywanczyk; Lawrence Daniel David; Matthew T. Tiersch; Eric J. White

Archive | 2007

Solution for forming polishing slurry, polishing slurry and related methods

Joseph K. V. Comeau; Marina M. Katsnelson; Matthew T. Tiersch; Eric J. White

Archive | 2011

SLURRY FOR CHEMICAL-MECHANICAL POLISHING OF COPPER AND USE THEREOF

Graham M. Bates; Michael T. Brigham; Joseph K. V. Comeau; Jason P. Ritter; Eva A. Shah; Matthew T. Tiersch; Eric J. White

Archive | 2012

Slurry for chemical-mechanical polishing of metals and use thereof

Graham M. Bates; Michael T. Brigham; Joseph K. V. Comeau; Jason P. Ritter; Matthew T. Tiersch; Eva A. Shah; Eric J. White

Archive | 2009

Method of forming silicon chicklet pedestal

S. Jay Chey; Timothy C. Krywanczyk; Mohammed S. Shaikh; Matthew T. Tiersch; Cornelia K. Tsang

Archive | 2012

Slurry für ein chemisch-mechanisches Polieren von Metallen und Verwendung desselben of the same slurry for a chemical-mechanical polishing of metals and using

Graham M. Bates; Jason P. Ritter; Matthew T. Tiersch; Eva A. Shah; Eric J. White; Michael T. Brigham; Joseph K. Comeau

Archive | 2012

of the same slurry for a chemical-mechanical polishing of metals and using

Graham M. Bates; Jason P. Ritter; Matthew T. Tiersch; Eva A. Shah; Eric J. White; Michael T. Brigham; Joseph K. Comeau

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Eric J. White

IBM

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Eva A. Shah

IBM

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Graham M. Bates

IBM

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Joseph K. V. Comeau

IBM

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Michael T. Brigham

IBM

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Timothy C. Krywanczyk

IBM

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Douglas Keith Sturtevant

IBM

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Cornelia K. Tsang

IBM

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Jason P. Ritter

Analytical Services

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Marina M. Katsnelson

IBM

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