Matthias Illing
Bosch
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Publication
Featured researches published by Matthias Illing.
international conference on solid state sensors actuators and microsystems | 2005
Gerhard Lammel; Simon Armbruster; Christoph Schelling; Hubert Benzel; Jörg Brasas; Matthias Illing; Ronald Gampp; Volkmar Senz; Frank Schäfer; Stefan Finkbeiner
One of the first MEMS products - the pressure sensor - has still room for innovation. We report a completely new pressure sensor generation based on a novel surface micromachining technology. Using porous silicon the membrane fabrication can be monolithically integrated with high synergy in an analog/digital semiconductor process suited for high volume production in an IC-fabrication facility. Only two mask layers and one electrochemical etching step are inserted at the beginning of a standard IC-process to transform the epitaxial silicon layer from the electronic process into a monocrystalline membrane with a vacuum cavity under it.
Archive | 2005
Hubert Benzel; Stefan Finkbeiner; Matthias Illing; Frank Schaefer; Simon Armbruster; Gerhard Lammel; Christoph Schelling; Joerg Brasas
Archive | 2005
Matthias Illing; Heribert Weber; Christoph Schelling; Heiko Stahl; Stefan Weiss
Archive | 2005
Matthias Illing; Heribert Weber; Christoph Schelling; Heiko Stahl; Stefan Weiss
Archive | 2012
Gary Yama; Fabian Purkl; Matthieu Liger; Matthias Illing
Archive | 2006
Joachim Berger; Roland Klatt; Reinhold Danner; Heinrich Barth; Anndreas Pfaeffle; Rainer Strohmaier; Thomas Bleile; Michael Scheidt; Matthias Illing; Wolfgang Dressler; Torsten Handler; Christof Rau; Thomas Pauer; Gottfried Flik; Udo Schulz; Wolfgang Fischer; Matthias Schueler; Jan Bahlo; Jean-Pierre Hathout
Archive | 2006
Joachim Berger; Roland Klatt; Reinhold Danner; Heinrich Barth; Andreas Pfaeffle; Rainer Strohmaier; Thomas Bleile; Michael Scheidt; Matthias Illing; Wolfgang Dressler; Torsten Handler; Christof Rau; Thomas Pauer; Gottfried Flik; Udo Schulz; Wolfgang Fischer; Matthias Schueler; Jan Bahlo; Jean-Pierre Hathout
Archive | 2006
Simon Armbruster; Hubert Benzel; Joerg Brasas; Armin Grundmann; Matthias Illing; Franz Lärmer; Christoph Schelling
Archive | 2006
Hubert Benzel; Stefan Finkbeiner; Matthias Illing; Frank Schaefer; Simon Armbruster; Gerhard Lammel; Christoph Schelling; Joerg Brasas
Archive | 2004
Hubert Benzel; Stefan Finkbeiner; Matthias Illing; Frank Schaefer; Simon Armbruster; Gerhard Lammel; Christoph Schelling; Joerg Brasas