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Matthias Patz

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Publication

Featured researches published by Matthias Patz.

Archive | 2002

Method of film formation, insulating film, and substrate for semiconductor

Michinori Nishikawa; Manabu Sekiguchi; Matthias Patz; Mutsuhiko Yoshioka; Atsushi Shiota; Kinji Yamada

Archive | 2002

Stacked film, insulating film and substrate for semiconductor

Michinori Nishikawa; Manabu Sekiguchi; Matthias Patz; Atsushi Shiota; Kinji Yamada

Archive | 2002

Method of film formation

Michinori Nishikawa; Manabu Sekiguchi; Matthias Patz; Mutsuhiko Yoshioka; Atsushi Shiota; Kinji Yamada

Archive | 2000

Diyne-containing (co) polymer, processes for producing the same, and cured film

Toshiyuki Akiike; Matthias Patz; Masayuki Takahashi; Kohei Goto; Michinori Nishikawa; Takashi Okada; Kinji Yamada

Journal of Photopolymer Science and Technology | 2002

Thermally Stable Polyarylenes with Low Dielectric Constant: Direction towards the Lowest Limit of Dielectrics

Kohei Goto; Toshiyuki Akiike; Keiji Konno; Tadahiro Shiba; Matthias Patz; Masayuki Takahashi; Yasutake Inoue; Minoru Matsubara

Archive | 2002

Filmherstellungsmethode, isolierende Schicht, und Halbleitersubstrat

Michinori Nishikawa; Matthias Patz; Manabu Sekiguchi; Atsushi Shiota; Kinji Yamada; Mutsuhiko Yoshioka

Archive | 2002

Gestapelte Schicht, isolierender Film und Substrate für Halbleiter Stacked layer insulating film and substrates for semiconductor

Michinori Yokkaichi City Nishikawa; Matthias Patz; Manabu Sekiguchi; Atsushi Shiota; Kinji Yamada

Archive | 2002

Filmherstellungsmethode Film production method

Michinori Nishikawa; Manabu Sekiguchi; Matthias Patz; Mutsuhiko Yoshioka; Atsushi Shiota; Kinji Yamada

Archive | 2002

Film production method

Michinori Nishikawa; Manabu Sekiguchi; Matthias Patz; Mutsuhiko Yoshioka; Atsushi Shiota; Kinji Yamada

Archive | 2002

Stacked layer insulating film and substrates for semiconductors

Michinori Yokkaichi City Nishikawa; Matthias Patz; Manabu Sekiguchi; Atsushi Shiota; Kinji Yamada

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Collaboration

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Kinji Yamada

Toshiba

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Atsushi Shiota

Toshiba

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Kohei Goto

Tokyo University of Science

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Takashi Okada

Yamagata University

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Yasutake Inoue

Kagawa University

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