Maurizio R. Gullo

Fabrication of epoxy spherical microstructures by controlled drop-on-demand inkjet printing

Well-controlled spherical microstructures open new possibilities for several MEMS devices, such as hemispherical microfluidic channels or micro-optical elements. However, machining of micro-spherical shapes has proven to be difficult with conventional planar micro-fabrication processes. This paper presents a fabrication method allowing the fabrication of controlled micro-spherical cap structures with defined edge angles. Drops of 30 pL of an epoxy solution were accurately inkjet printed on circular platforms. The deposited volume is confined by the rim of the platforms. This allows a fine tuning of the spherical cap edge angle as well as its height and radius of curvature. The presented method allowed fabricating large arrays of well-controlled micro-spherical shapes of different diameters, ranging from 50 to 930 μm, with a maximum controlled edge angle tuning of 85°. Theoretical investigations of the underlying phenomena are also presented. Good agreement between experimental results and theoretical expectations has been observed, with standard deviations below 3%. Using the proposed method, several 2D arrays up to 900 micro hemispheres with an edge angle of 90° ± 2° have been fabricated with a yield above 98%.

Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions

Structuring SU-8 based superparamagnetic polymer composite (SPMPC) containing Fe3O4 nanoparticles by photolithography is limited in thickness due to light absorption by the nanoparticles. Hence, obtaining thicker structures requires alternative processing techniques. This paper presents a method based on inkjet printing and thermal curing for the fabrication of much thicker hemispherical microstructures of SPMPC. The microstructures are fabricated by inkjet printing the nanoparticle-doped SU-8 onto flat substrates functionalized to reduce the surface energy and thus the wetting. The thickness and the aspect ratio of the printed structures are further increased by printing the composite onto substrates with confinement pedestals. Fully crosslinked microstructures with a thickness up to 88.8 μm and edge angle of 112° ± 4° are obtained. Manipulation of the microstructures by an external field is enabled by creating lines of densely aggregated nanoparticles inside the composite. To this end, the printed microstructures are placed within an external magnetic field directly before crosslinking inducing the aggregation of dense Fe3O4 nanoparticle lines with in-plane and out-of-plane directions.

Acousto-fluidic system assisting in-liquid self-assembly of microcomponents

In this paper, we present the theoretical background, design, fabrication and characterization of a micromachined chamber assisting the fluidic self-assembly of micro-electro-mechanical systems in a bulk liquid. Exploiting bubble-induced acoustic microstreaming, several structurally-robust driving modes are excited inside the chamber. The modes promote the controlled aggregation and disaggregation of microcomponents relying on strong and reproducible fluid mixing effects achieved even at low Reynolds numbers. The functionality of the microfluidic chamber is demonstrated through the fast and repeatable geometrical pairing and subsequent unpairing of polymeric microcylinders. Relying only on drag and radiation forces and on the natural hydrophobicity of SU-8 in aqueous solutions, assembly yields of approximately 50% are achieved in no longer than ten seconds of agitation. The system can stochastically control the assembly process and significantly reduce the time-to-assembly of building blocks.

Cytotoxicity evaluation of polymer-derived ceramics for pacemaker electrode applications

Ceramics are known to be chemically stable, and the possibility to electrically dope polymer-derived ceramics makes it a material of interest for implantable electrode applications. We investigated cytotoxic characteristics of four polymer-derived ceramic candidates with either electrically conductive or insulating properties. Cytotoxicity was assessed by culturing C2C12 myoblast cells under two conditions: by exposing them to material extracts and by putting them directly in contact with material samples. Cell spreading was optically evaluated by comparing microscope observations immediately after the materials insertion and after 24 h culturing. Cell viability (MTT) and mortality (LDH) were quantified after 24-h incubation in contact with the materials. Comparison was made with biocompatible positive references (alumina, platinum, biocompatible stainless steel 1.4435), negative references (latex, stainless steel 1.4301) and controls (no material present in the culture wells). We found that the cytotoxic properties of tested ceramics are comparable to established reference materials. These ceramics, which are reported to be very stable, can be microstructured and electrically doped to a wide range of conductivity and are thus excellent candidates for implantable electrode applications including pacemakers.

Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

Fluid-mediated self-assembly is one of the most promising routes for assembling and packaging smart microsystems in a scalable and cost-efficient way. In this work the pairwise fluidic self-assembly of 100 μm-sized SU-8 cylinders is studied with respect to two driving mechanisms: capillary forces at the liquid–air interface and the hydrophobic effect while fully immersed in liquid. The pairwise self-assembly is controlled by shape recognition and selective surface functionalization. Surface energy contrast is introduced through oxygen plasma treatment and local deposition of a hydrophobic self-assembled monolayer, respectively leading to face-selective hydrophilic and hydrophobic behavior. When in bulk liquid, after less than a day face-wise self-assembly of more than 650 components is achieved with a yield of up to 97% and with less than 1% of the cylinders assembled incorrectly. This technique is subsequently adopted for self-assembling half-capsules into closed micro-capsules, thereby entrapping a liquid during their self-assembly. The release of the liquid can subsequently be triggered in another medium, as intended for applications involving e.g. chemical reactors, environmental engineering and drug release.

Rapid carbon nanotubes suspension in organic solvents using organosilicon polymers

A strategy for a simple dispersion of commercial multi-walled carbon nanotubes (MWCNTs) using two organosilicones, polycarbosilane SMP10 and polysilazane Ceraset PSZ20, in organic solvents such as cyclohexane, tetrahydrofuran (THF), m-xylene and chloroform is presented. In just a few minutes the combined action of sonication and the presence of Pt(0) catalyst is sufficient to obtain a homogeneous suspension, thanks to the rapid hydrosilylation reaction between SiH groups of the polymer and the CNT sidewall. The as-produced suspensions have a particle size distribution <1μm and remain unchanged after several months. A maximum of 0.47 and 0.50mg/ml was achieved, respectively, for Ceraset in THF and SMP10 in chloroform. Possible applications as polymeric and ceramic thin films or aerogels are presented.

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

Integrated Long-Range Thermal Bimorph Actuators for Parallelizable Bio-AFM Applications

Atomic force microscope (AFM)-based cell force spectroscopy is an emerging research method that has already enhanced our understanding of the structural changes that take place in a cell as it becomes cancerous. However, the method is limited as it is not time-efficient in its current state of development. This paper presents the fabrication of an integrated long-range thermal bimorph actuator that controls the z-position of an AFM cantilever in liquid. Multiplied in arrays, such individually actuated probes can parallelize cell force spectroscopy measurements, thereby drastically reducing the time per measured cell. The need to accommodate differences in tip-sample distance implies an individual device actuation range of

SU-8 C-MEMS as candidate for long-term implantable pacemaker micro electrodes

{\geq}{\rm 10}~\mu{\rm m}

In-liquid MEMS assembly by optical trapping

out-of-plane. In addition, any cross-talk, i.e., between actuators or between the actuator and the force sensor, must be minimized. To meet these requirements, we design and fabricate a novel thermal bimorph actuator that is paired with a force sensing cantilever. In order to keep temperatures in a bio-friendly range, the design is optimized for high thermomechanical sensitivity. Finite element model simulations confirmed that the surrounding liquid constitutes a large thermal reservoir that absorbs the generated heat without any dramatic temperature increase. Furthermore, given that a cell substrate material of high thermal conductivity is chosen, e.g., Si, the thermal coupling between the cell and the substrate, dominates over that between the cell and the actuator. Suspended silicon nitride structures with platinum electrodes are microfabricated through standard techniques. The finalized actuator is able to displace the cantilever out-of-plane by