Mauro Marchi

Developments of the in-check platform for diagnostic applications

In-Check is STMicroelectronics proprietary platform for molecular diagnostics. In-Check lays its foundations on the monolithic integration of microelectronics and micromachining technology MEMS, with microfluidic and optical features, bio-chemical surface functionalization and molecular biology. It comprises a core lab-on-chip device, control and reading instrumentation, a complete suite of software modules, and application protocols. Leveraging on such capabilities, In-Check enables fast, highly sensitive and specific, multi-analytical capability of nucleic acid analysis. The platform provides a unique combination of nucleic acid amplification, by polymerase-chain-reaction and target identification and typing by DNA microarray. These integrated biological functionalities together with top quality standard and process control are key features for a platform to be accepted by the highly demanding modern medical diagnostic. This paper describes recent developments of In-Check and some core biological characterizations.

Batch fabricated silicon electrostatic micropositioner for dual stage actuation

Hard Disk Drives (HDD) are the most widely used data-storage medium. The Track Per Inch (TPI) limit is related to mechanical resonances of the positioning arm and to low frequency bearing effect. A secondary actuator must be able to position precisely with higher bandwidth the Read/Write (RW) head with respect to the magnetic track with any interference with the magnetic data recorded on the disk. MEMS technology allows the fabrication of such electrostatic microactuator for the secondary stage in the HDD. The paper presents the basics requirements for the secondary actuator for the HDD as well as the process developed to fulfill those. Accurate calculation and FEM simulation are required to lead to high performance and robust design. After the built a deep experimental analysis is ducted to confirm and refine design parameters.

Novel process for realization of multiple-axis actuators suitable for the realization of an optical switch

This paper illustrates a novel MEMS technology that allows the creation of a multiple axis actuator / sensor trough deep silicon etching and wafer bonding techniques. As example a dual axis rotational high-stroke MEMS actuator is presented. This device can integrate a mirror to realize a device used, for example, in fully optical multiplexer. Microfabrication technology derives from our previous works and it’s based on deep silicon trench techniques as well as on wafer bonding capabilities. More over the resulting assembly after the wafer bonding is machined to proceed on realizing the complete MEMS device.