Michele Palmieri

Smart power approaches VLSI complexity

This paper reviews the latest trends in the mixed power process field driven by the need to integrate increasing numbers of functions on the same chip. The more recent BCD (bipolar-CMOS-DMOS) examples are a demonstration of how smart power technology evolves following, with some delay, the road maps of VLSI CMOS and BiCMOS. The issues behind the trend to converge to a common technology platform, maintaining the peculiar aspects of power functions integration, are discussed, as well as new possible realizations in the field of super smart power ICs.

LDMOS implementation by large tilt implant in 0.6 /spl mu/m BCD5 process, flash memory compatible

This paper describes a method for integrating power LDMOS structures in a smart power Bipolar-CMOS-DMOS technology called BCD5 designed at 0.6 /spl mu/m, compatible with VLSI EPROM, EEPROM and flash non volatile memories (NVM). The compatibility between NVM and LDMOS is achieved replacing conventional DMOS manufacturing processes, consisting of high temperature diffusion steps, with an innovative approach that exploits large angle of tilt implantation technique.

Characteristics and applications of a 0.6 /spl mu/m bipolar-CMOS-DMOS technology combining VLSI non-volatile memories

This paper describes the 5th generation, designed at 0.6 /spl mu/m, of the BCD process family commercially introduced ten years ago. Called BCD5, this smart power process provides very dense and high performance bipolar, CMOS and DMOS functions and is compatible with VLSI EPROM, EEPROM and Flash Non-Volatile Memories. Extremely complex systems requiring analog, digital and power functions, /spl mu/P cores and significant amount of memories (hundreds of Kbits) can be realized in one chip (Super Smart Power integration) using BCD5.

Developments of the in-check platform for diagnostic applications

In-Check is STMicroelectronics proprietary platform for molecular diagnostics. In-Check lays its foundations on the monolithic integration of microelectronics and micromachining technology MEMS, with microfluidic and optical features, bio-chemical surface functionalization and molecular biology. It comprises a core lab-on-chip device, control and reading instrumentation, a complete suite of software modules, and application protocols. Leveraging on such capabilities, In-Check enables fast, highly sensitive and specific, multi-analytical capability of nucleic acid analysis. The platform provides a unique combination of nucleic acid amplification, by polymerase-chain-reaction and target identification and typing by DNA microarray. These integrated biological functionalities together with top quality standard and process control are key features for a platform to be accepted by the highly demanding modern medical diagnostic. This paper describes recent developments of In-Check and some core biological characterizations.