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Dive into the research topics where Mehran Nasser-Ghodsi is active.

Publication


Featured researches published by Mehran Nasser-Ghodsi.


Archive | 2002

Methods and apparatus for dishing and erosion characterization

Mehran Nasser-Ghodsi; Phil Wood


Archive | 2002

Methods and apparatus for electron beam inspection of samples

Mehran Nasser-Ghodsi; Michael Cull


Archive | 2013

Apparatus and methods for inspecting extreme ultra violet reticles

Mehran Nasser-Ghodsi; Stanley E. Stokowski; Mehdi Vaez-Iravani


Archive | 2007

Use of ion implantation in chemical etching

Ming Lun Yu; Mehran Nasser-Ghodsi


Archive | 2005

Methods and systems for preparing a copper containing substrate for analysis

David A. Soltz; Mehran Nasser-Ghodsi; Harold Winters; John W. Coburn; Alexander Jozef Gubbens; Gabor D. Toth


Archive | 2005

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

Mehran Nasser-Ghodsi; Mark Borowicz; Dave Bakker; Mehdi Vaez-Iravani; Prashant Aji; Rudy F. Garcia; Tzu Chin Chuang


Archive | 2008

Calibration standard for a dual beam (FIB/SEM) machine

Marco Tortonese; Mehran Nasser-Ghodsi


Archive | 2006

Methods and Systems for Creating a Recipe for a Defect Review Process

S. Mark Borowicz; Mehran Nasser-Ghodsi; Kenneth J. Krzeckzowski


Archive | 2008

Method and instrument for chemical defect characterization in high vacuum

Mehran Nasser-Ghodsi; Ming Lun Yu; Stuart Friedman; Gabor D. Toth


Archive | 2001

Methods and apparatus for void characterization

Mehran Nasser-Ghodsi; Anne L. Testoni; Steven Oestreich

Collaboration


Dive into the Mehran Nasser-Ghodsi's collaboration.

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