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Gabor D. Toth

KLA-Tencor

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Publication

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Archive | 2010

CHARGED-PARTICLE ENERGY ANALYZER

Khashayar Shadman; Robert Haynes; Gabor D. Toth; Christopher Sears; Mehran Nasser Ghodsi

Archive | 2003

Single tool defect classification solution

Gabor D. Toth; David R. Bakker

Archive | 2004

Apparatus and method for e-beam dark field imaging

Douglas K. Masnaghetti; Gabor D. Toth; Eric Munro; Jeffrey Keister

Archive | 2010

Defect review using image segmentation

Gabor D. Toth; Douglas K. Masnaghetti

Archive | 2004

Filtered e-beam inspection and review

David L. Adler; Luca Grella; Gabor D. Toth

Archive | 2005

Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems

David A. Soltz; Paul Wieczorek; Aaron Zuo; Gabor D. Toth

Archive | 2003

Apparatus and methods of controlling surface charge and focus

Mark A. McCord; Jan Lauber; Paul Petric; Ross W. Thompson; Jason Lim; Frank Y. H. Fan; Gabor D. Toth

Archive | 2003

Dual electron beam instrument for multi-perspective

Gabor D. Toth; John A. Notte; Richard A. Price

Archive | 2005

Methods and systems for preparing a copper containing substrate for analysis

David A. Soltz; Mehran Nasser-Ghodsi; Harold Winters; John W. Coburn; Alexander Jozef Gubbens; Gabor D. Toth

Archive | 2005

Wien filter with reduced chromatic aberration

Gabor D. Toth; Douglas K. Masnaghetti; Jeffrey Keister; Eric Munro

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Collaboration

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Mehran Nasser-Ghodsi

KLA-Tencor

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Douglas K. Masnaghetti

KLA-Tencor

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Khashayar Shadman

KLA-Tencor

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Stuart Friedman

KLA-Tencor

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Ming Lun Yu

KLA-Tencor

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David A. Soltz

KLA-Tencor

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Eric Munro

KLA-Tencor

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Jeffrey Keister

KLA-Tencor

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Mark A. McCord

KLA-Tencor

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Rudy F. Garcia

KLA-Tencor

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