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Melvin Warren Montgomery

Applied Materials

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Publication

Featured researches published by Melvin Warren Montgomery.

Archive | 2001

Method of preparing optically imaged high performance photomasks

Scott E. Fuller; Melvin Warren Montgomery; Jeffrey A. Albelo; Alex Buxbaum

Archive | 2001

Method of reshaping a patterned organic photoresist surface

Alex Buxbaum; Melvin Warren Montgomery

Archive | 2001

Method of extending the stability of a photoresist during direct writing of an image upon the photoresist

Melvin Warren Montgomery; Cecilia Annette Montgomery

Archive | 2005

Reticle fabrication using a removable hard mask

Christopher Dennis Bencher; Melvin Warren Montgomery; Alexander Buxbaum; Yung-Hee Yvette Lee; Jian Ding; Gilad Almogy; Wendy H. Yeh

Archive | 2001

Organic bottom antireflective coating for high performance mask making using optical imaging

Melvin Warren Montgomery; Jeffrey A. Albelo

Archive | 2004

Method of increasing the shelf life of a blank photomask substrate

Scott E. Fuller; Melvin Warren Montgomery; Jeffrey A. Albelo; Alex Buxbaum

Archive | 2001

Photoresist topcoat for deep ultraviolet (DUV) direct write laser mask fabrication

Melvin Warren Montgomery; Jeffrey A. Albelo; Zoilo Cheng Ho Tan

Archive | 2004

Method of extending the stability of a photoresist during direct writing of an image

Melvin Warren Montgomery; Cecilia Annette Montgomery

Archive | 2003

Sensitized chemically amplified photoresist for use in photomask fabrication and semiconductor processing

Melvin Warren Montgomery; Christopher Hamaker

Archive | 2002

Method of producing a patterned photoresist used to prepare high performance photomasks

Melvin Warren Montgomery; Alex Buxbaum; Scott E. Fuller; Cecilia Annette Montgomery

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Alex Buxbaum

Applied Materials

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Jeffrey A. Albelo

Applied Materials

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Cecilia Annette Montgomery

Applied Materials

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Scott E. Fuller

Applied Materials

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Alexander Buxbaum

Applied Materials

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Christopher Dennis Bencher

Applied Materials

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Christopher Hamaker

Applied Materials

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Gilad Almogy

Applied Materials

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Jian Ding

Applied Materials

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Wendy H. Yeh

Applied Materials

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