Merlyn H Perkins

Electron beam writing method and system using large range deflection in combination with a continuously moving table

Method for improving the sharp transition of superconductive films

Method and apparatus for controlling brightness and alignment of a beam of charged particles

Method of fabricating coaxial wires in back panels

Method and system for automatically correcting aberrations of a beam of charged particles

APPARATUS FOR FORMING CIRCUIT MASKS ON PHOTOSENSITIZED SCREENS AND INSPECTING THE SAME AND/OR INSPECTING SUBSTRATES HAVING CONDUCTIVE CIRCUIT PATTERNS

Verfahren und anordnung zur korrektur einer aberration eines aus geladenen teilchen bestehenden strahls

Verfahren zur elektronenstrahlaufzeichnung und system in verbindung mit kontinuierlich verschiebbarem tisch unter verwendung von gross-bereichsablenkung. A method for electron beam recording and system in connection with continuously sliding table with use of large-area distraction.

A method for electron beam recording and system in connection with a continuously sliding table using large-area distraction.

Verfahren zur Elektronenstrahlaufzeichnung und System in Verbindung mit kontinuierlich verschiebbarem Tisch unter Verwendung von Gross-Bereichsablenkung