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Michael B. Korzenski

IBM

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Publication

Featured researches published by Michael B. Korzenski.

Archive | 2009

Methods for stripping material for wafer reclamation

Michael B. Korzenski; Ping Jiang; David W. Minsek; Charles Beall; Mick Bjelopavlic

Archive | 2007

Liquid cleaner for the removal of post-etch residues

Pamela M. Visintin; Ping Jiang; Michael B. Korzenski; David W. Minsek; Emanuel I. Cooper; Ming-Ann Hsu; Kristin A. Fletcher

Archive | 2007

Compositions and methods for the removal of photoresist for a wafer rework application

Pamela M. Visintin; Michael B. Korzenski

Archive | 2007

Formulations for cleaning memory device structures

Pamela M. Visintin; Michael B. Korzenski

Archive | 2009

Use of surfactant/defoamer mixtures for enhanced metals loading and surface passivation of silicon substrates

Michael B. Korzenski; Ping Jiang; Charles Beall; Mick Bjelopavlic

Archive | 2009

Low ph mixtures for the removal of high density implanted resist

Emanuel I. Cooper; Julie Cissell; Renjie Zhou; Michael B. Korzenski; George G. Totir; Mahmoud Khojasteh

Archive | 2007

Compositions and methods for the selective removal of silicon nitride

Emanuel I. Cooper; Eileen R. Sparks; William R. Bowers; Mark Biscotto; Kevin P. Yanders; Michael B. Korzenski; Prerna Sonthalia; Nicole E. Thomas

Archive | 2008

Wafer reclamation compositions and methods

Pamela M. Visintin; Ping Jiang; Michael B. Korzenski; Mackenzie King; Jianwen Han; Monica K. Hilgarth; Jun Liu; Renjie Zhou; David W. Minsek

Archive | 2008

Composition and method for removing ion-implanted photoresist

Renjie Zhou; Emanuel I. Cooper; Michael B. Korzenski; Ping Jiang

Archive | 2008

Composition et procédé pour retirer un photorésist à implantation ionique

Emanuel I. Cooper; Ping Jiang; Michael B. Korzenski; Renjie Zhou

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Ping Jiang

Entegris

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Pamela M. Visintin

University of North Carolina at Chapel Hill

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Emanuel I. Cooper

IBM

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Renjie Zhou

IBM

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Mark Biscotto

Entegris

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George G. Totir

IBM

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Julie Cissell

IBM

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Mahmoud Khojasteh

IBM

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