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Michael Dr Ing Dr Offenberg

Bosch

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Publication

Featured researches published by Michael Dr Ing Dr Offenberg.

Archive | 1995

Sensor, esp. acceleration sensor

Juergen Kurle; Karsten Funk; Franz Laermer; Michael Dr Ing Dr Offenberg; Andrea Schilp

Archive | 1993

Micromechanical sensor and method for its production

Joerg Muchow; Horst Muenzel; Michael Dr Ing Dr Offenberg; Winfried Waldvogel

Archive | 1994

Silicon substrate based force or acceleration sensor

Michael Dr Ing Dr Offenberg; Wolfgang Dr Ing Dr Buchholtz; Markus Lutz

Archive | 1992

Membrane used in sensors - comprising membrane stretched by elastic connection in frame of single crystalline silicon@

Horst Muenzel; Michael Dr Ing Dr Offenberg; Eckart Reihlen

Archive | 1993

Verfahren zur Herstellung von Sensoren und Sensor

Frank Bantien; Gerhard Benz; Franz Laermer; Jiri Dr Ing Dr Marek; Horst Muenzel; Michael Dr Ing Dr Offenberg; Andrea Schilp

Archive | 1995

Structure esp. micro-dosing system prodn.

Frank Bantien; Guenther Dipl Ing Findler; Hans-Peter Trah; Helmut Baumann; Franz Laermer; Michael Dr Ing Dr Offenberg; Andrea Schilp

Archive | 1993

Method for producing sensors, and sensor

Gerhard Benz; Jiri Dr Ing Dr Marek; Frank Bantien; Horst Muenzel; Franz Laermer; Michael Dr Ing Dr Offenberg; Andrea Schilp

Archive | 1996

Verfahren zur herstellung eines coriolis-drehratensensors

Horst Dr Ing Dr Muenzel; Franz Laermer; Michael Dr Ing Dr Offenberg; Andrea Schilp; Markus Lutz

Archive | 1995

Multilayer silicon sensor, esp. acceleration sensor

Peter Sulzberger; Michael Dr Ing Dr Offenberg; Bernhard Elsner; Markus Lutz

Archive | 1992

Acceleration sensor with seismic mass and bending section - embedded in evacuated cavity inside layers of silicon so that movement varies capacitance

Jiri Dr Ing Dr Marek; Martin Dr Ing Dr Willmann; Horst Muenzel; Helmut Baumann; Dietrich Schubert; Michael Dr Ing Dr Offenberg

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Andrea Schilp

Bosch

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Horst Muenzel

Bosch

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Franz Laermer

Bosch

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Markus Lutz

Bosch

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Bernhard Elsner

Bosch

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Frank Bantien

Bosch

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Horst Dr Ing Dr Muenzel

Bosch

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Jiri Dr Ing Dr Marek

Bosch

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Joerg Muchow

Bosch

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Winfried Waldvogel

Bosch

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