Michael Kast
EV Group
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Publication
Featured researches published by Michael Kast.
28th European Mask and Lithography Conference (EMLC 2012) | 2012
Michael Mühlberger; Hannes Fachberger; Iris Bergmair; Michael Rohn; Bernd Dittert; Rainer Schöftner; Thomas Rothländer; Dieter Nees; Ursula Palfinger; Anja Haase; Alexander Fian; Martin Knapp; Claudia Preininger; Gerald Kreindl; Michael Kast; T. Fromherz
The NILaustria research project cluster consists of 8 individual research projects and aims to improve nanoimprint lithography in an application driven approach. The cluster is presented as well as highlights from the projects, e.g. the replication of 12.5nm half pitch features using working stamp copies, topics from organic electronics, metamaterials and SiGe technology. An outlook on the new activities is given.
Archive | 2015
Michael Kast; Markus Wimplinger
Optik & Photonik | 2010
Thomas Glinsner; Gerald Kreindl; Michael Kast
Archive | 2010
Michael Kast; Markus Wimplinger
Archive | 2010
Michael Kast; Alois Malzer
Archive | 2011
Michael Kast
Archive | 2010
Michael Kast; Markus Wimplinger
Archive | 2010
Erich Thallner; Markus Wimplinger; Michael Kast
Archive | 2015
Michael Kast
Archive | 2010
Erich Thallner; Markus Wimplinger; Michael Kast