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Dive into the research topics where Michael Kast is active.

Publication


Featured researches published by Michael Kast.


28th European Mask and Lithography Conference (EMLC 2012) | 2012

Nanoimprint activities in Austria in the research project cluster NILaustria

Michael Mühlberger; Hannes Fachberger; Iris Bergmair; Michael Rohn; Bernd Dittert; Rainer Schöftner; Thomas Rothländer; Dieter Nees; Ursula Palfinger; Anja Haase; Alexander Fian; Martin Knapp; Claudia Preininger; Gerald Kreindl; Michael Kast; T. Fromherz

The NILaustria research project cluster consists of 8 individual research projects and aims to improve nanoimprint lithography in an application driven approach. The cluster is presented as well as highlights from the projects, e.g. the replication of 12.5nm half pitch features using working stamp copies, topics from organic electronics, metamaterials and SiGe technology. An outlook on the new activities is given.


Archive | 2015

Method and device for producing a lens wafer

Michael Kast; Markus Wimplinger


Optik & Photonik | 2010

Nanoimprint Lithography: The technology makes its mark on CMOS image sensors and in the nano-world

Thomas Glinsner; Gerald Kreindl; Michael Kast


Archive | 2010

STAMPING TOOL, DEVICE AND METHOD FOR PRODUCING A LENS WAFER

Michael Kast; Markus Wimplinger


Archive | 2010

DEVICE AND METHOD FOR REDUCING A WEDGE ERROR

Michael Kast; Alois Malzer


Archive | 2011

Process for heat embossing a polymer layer

Michael Kast


Archive | 2010

DIE TOOL, DEVICE AND METHOD FOR PRODUCING A LENS WAFER

Michael Kast; Markus Wimplinger


Archive | 2010

Method and device for producing a microlens

Erich Thallner; Markus Wimplinger; Michael Kast


Archive | 2015

Method and device for producing a plurality of microlenses

Michael Kast


Archive | 2010

Method and device for producing a micro-lens

Erich Thallner; Markus Wimplinger; Michael Kast

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Claudia Preininger

Austrian Institute of Technology

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T. Fromherz

Johannes Kepler University of Linz

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