Is this you? Create Your Porfile
Avatar

Michael S. Bakeman

KLA-Tencor

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Michael S. Bakeman is active.

Explore More

Publication

Featured researches published by Michael S. Bakeman.

Archive | 2013

Metrology Tool With Combined X-Ray And Optical Scatterometers

Michael S. Bakeman; Andrei V. Shchegrov

Archive | 2013

Optical metrology using targets with field enhancement elements

Jonathan M. Madsen; Andrei V. Shchegrov; Michael S. Bakeman; Thaddeus Gerard Dziura; Alexander Kuznetsov; Bin-Ming (Benjamin) Tsai

Archive | 2013

Combined x-ray and optical metrology

Kevin Peterlinz; Andrei V. Shchegrov; Michael S. Bakeman; Thaddeus Gerard Dziura

Archive | 2013

Model building and analysis engine for combined x-ray and optical metrology

Michael S. Bakeman; Andrei V. Shchegrov; Qiang Zhao; Zhengquan Tan

Archive | 2014

SMALL-ANGLE SCATTERING X-RAY METROLOGY SYSTEMS AND METHODS

Michael S. Bakeman; Andrei V. Shchegrov; Ady Levy; Guorong V. Zhuang; John J. Hench

Archive | 2014

METHODS AND APPARATUS FOR MEASURING SEMICONDUCTOR DEVICE OVERLAY USING X-RAY METROLOGY

Andrei Veldman; Michael S. Bakeman; Andrei V. Shchegrov; Walter D. Mieher

Archive | 2014

Metrology Tool With Combined XRF And SAXS Capabilities

Michael S. Bakeman; Andrei V. Shchegrov; Kevin Peterlinz; Thaddeus Gerard Dziura

Archive | 2015

Scatterometry-Based Imaging and Critical Dimension Metrology

Abdurrahman Sezginer; John J. Hench; Michael S. Bakeman

Archive | 2017

Confined illumination for small spot size metrology

Derrick Shaughnessy; Michael S. Bakeman; Guorong V. Zhuang; Andrei V. Shchegrov; Leonid Poslavsky

Archive | 2016

Computationally Efficient X-ray Based Overlay Measurement

John J. Hench; Andrei V. Shchegrov; Michael S. Bakeman

Explore More

Collaboration

Dive into the Michael S. Bakeman's collaboration.

Top Co-Authors
Avatar

Andrei V. Shchegrov

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

John J. Hench

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Guorong V. Zhuang

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Thaddeus Gerard Dziura

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Abdurrahman Sezginer

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Jonathan M. Madsen

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Kevin Peterlinz

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Qiang Zhao

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Zhengquan Tan

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Ady Levy

KLA-Tencor

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge