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Michael S. Barnes

Intevac

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Publication

Featured researches published by Michael S. Barnes.

Archive | 2009

CVD flowable gap fill

Chi-I Lang; Judy Huang; Michael S. Barnes; Sunil Shanker

Archive | 2013

Flowable film dielectric gap fill process

Vishal Gauri; Raashina Humayun; Chi-I Lang; Judy Huang; Michael S. Barnes; Sunil Shanker

Archive | 2008

Apparatus and methods for transporting and processing substrates

Terry Bluck; Kevin P. Fairbairn; Michael S. Barnes; Christopher T. Lane

Archive | 2008

Power source arrangement for multiple-target sputtering system

Terry Bluck; Patrick R. Ward; Michael S. Barnes

Archive | 2009

System and method for processing substrates with detachable mask

Michael S. Barnes; Terry Bluck

Archive | 2009

Processing tool with combined sputter and evaporation deposition sources

D. Guy Eristoff; Michael S. Barnes; Arthur C. Wall; Terry Bluck

Archive | 2010

Process for optimization of island to trench ratio in patterned media

Houng T. Nguyen; Ren Xu; Michael S. Barnes

Archive | 2008

Hybrid etch chamber with decoupled plasma controls

Jang Gyoo Yang; Michael S. Barnes; Terry Bluck

Archive | 2008

System and method for dual-sided sputter etch of substrates

Michael S. Barnes; Terry Bluck

Archive | 2008

System and method for commercial fabrication of patterned media

Kevin P. Fairbairn; Michael S. Barnes; Terry Bluck; Ren Xu; Charles Liu; Ralph Kerns

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Collaboration

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Terry Bluck

Intevac

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Judy Huang

Intevac

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Kevin P. Fairbairn

Intevac

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Ren Xu

Intevac

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Charles Liu

Intevac

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Arthur C. Wall

Intevac

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Christopher T. Lane

Intevac

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D. Guy Eristoff

Intevac

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Houng T. Nguyen

Intevac

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Jang Gyoo Yang

Intevac

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