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Michitaka Ootani

Shin-Etsu Chemical

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Publication

Featured researches published by Michitaka Ootani.

Archive | 2005

Top coat composition

Kazuhiko Maeda; Haruhiko Komoriya; Shinichi Sumida; Satoru Miyazawa; Michitaka Ootani

Archive | 2003

Esters, polymers, resist compositions and patterning process

Yuji Harada; Jun Hatakeyama; Yoshio Kawai; Masaru Sasago; Masayuki Endo; Shinji Kishimura; Kazuhiko Maeda; Michitaka Ootani; Haruhiko Komoriya

Archive | 2006

Novel ester compound, polymer, resist composition, and patterning process

Yuji Harada; Jun Hatakeyama; Yoshio Kawai; Masaru Sasago; Masayuki Endo; Kazuhiko Maeda; Haruhiko Komoriya; Michitaka Ootani

Archive | 2005

Fluorine-Containing Cyclic Compound, Fluorine-Containing Polymer Compound, Resist Material Using Same and Method for Forming Pattern

Haruhiko Komoriya; Shinichi Sumida; Michitaka Ootani; Takeo Komata; Kazuhiko Maeda

Archive | 2002

Chemically amplified resist compositions and patterning process

Jun Hatakeyama; Yuji Harada; Yoshio Kawai; Masaru Sasago; Masayuki Endo; Shinji Kishimura; Michitaka Ootani; Haruhiko Komoriya; Kazuhiko Maeda

Archive | 2006

Novel polymerizable ester compounds

Yuji Harada; Jun Hatakeyama; Yoshio Kawai; Kazuhiko Maeda; Haruhiko Komoriya; Michitaka Ootani

Archive | 2005

Process for producing top coat film used in lithography

Kazuhiko Maeda; Michitaka Ootani; Haruhiko Komoriya

Archive | 2000

Positive resist composition and process for forming resist pattern using same

Kentaro Tsutsumi; Michitaka Ootani; Kazuhiko Maeda

Archive | 2002

Novel ester compounds

Yuji Harada; Jun Hatakeyama; Yoshio Kawai; Masaru Sasago; Masayuki Endo; Shinji Kishimura; Kazuhiko Maeda; Michitaka Ootani; Haruhiko Komoriya

Archive | 2006

Polymerizable ester compounds

Yuji Harada; Jun Hatakeyama; Yoshio Kawai; Kazuhiko Maeda; Haruhiko Komoriya; Michitaka Ootani

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Collaboration

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Haruhiko Komoriya

Shin-Etsu Chemical

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Kazuhiko Maeda

IBM

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Jun Hatakeyama

Shin-Etsu Chemical

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Yoshio Kawai

Shin-Etsu Chemical

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Yuji Harada

Shin-Etsu Chemical

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Kazuhiko Maeda

IBM

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Masaru Sasago

Osaka Prefecture University

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Masayuki Endo

Panasonic

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Shinji Kishimura

Mitsubishi Electric

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Takeo Komata

Chiba University

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