Mikio Ichihashi | Researchain

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Featured researches published by Mikio Ichihashi.

Archive | 2001

Method and apparatus for measuring physical properties of micro region

Yoshifumi Taniguchi; Mikio Ichihashi; Masanari Kouguchi

Archive | 2003

Method and apparatus for scanning transmission electron microscopy

Kuniyasu Nakamura; Hiroshi Kakibayashi; Mikio Ichihashi; Shigeto Isakozawa; Yuji Sato; Takahito Hashimoto

Archive | 2002

Observation apparatus and observation method using an electron beam

Masanari Koguchi; Kuniyasu Nakamura; Kaoru Umemura; Yoshifumi Taniguchi; Mikio Ichihashi

Archive | 1991

Combination apparatus having a scanning electron microscope therein

Hironobu Matsui; Mikio Ichihashi; Sumio Hosaka; Yoshinori Nakayama; Satoshi Haraichi; Fumikazu Itoh; Akira Shimase; Yoshimasa Kondo; Shigeyuki Hosoki; Masakazu Ichikawa; Yukio Honda; Tsuyoshi Hasegawa; Shiji Okazaki; Shunji Maeda; Hitoshi Kubota

Archive | 1984

Small-dimension measurement system by scanning electron beam

Mikio Ichihashi; Satoru Fukuhara; Masahide Okumura; Hisaya Murakoshi

Archive | 1997

Sample evaluation/process observation system and method

Hiroshi Hirose; Hidemi Koike; Shigeto Isakozawa; Yuji Sato; Mikio Ichihashi; Motohide Ukiana

Archive | 2005

Method and an apparatus of an inspection system using an electron beam

Yuko Iwabuchi; Hideo Todokoro; Hiroyoshi Mori; Mitsugu Sato; Yasutsugu Usami; Mikio Ichihashi; Satoru Fukuhara; Hiroyuki Shinada; Yutaka Kaneko; Katsuya Sugiyama; Atsuko Takafuji; Hiroshi Toyama

Archive | 1993