Mikio Nishio
Panasonic
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Publication
Featured researches published by Mikio Nishio.
The Japan Society of Applied Physics | 1996
Mikio Nishio; Tomoyasu Murakami; Masashi Hamanaka
We have studied a CMP system with a ring-shaped pressure plate, called Pad-Press Ring ( PPR ), to control the pad-profile during polishing. PPR works as an excellent iz-silz pad-profile controller and improves the polishing uniformity drastically. This system does not need the complicated ex-sinpaA-ptofile control, using the conventional film-backed carrier, two-layered pad, and fumed silica slurry. The non-uniformity of 6Yo calculated by ( Max-Min )+( 2 X Average ) is obtained with a wafer-edgo exclusion lenglh of 5 mm.
Archive | 1995
Masayuki Endo; Akemi Kawaguchi; Mikio Nishio; Shin Hashimoto
Archive | 1996
Tomoyasu Murakami; Mikio Nishio
Archive | 1997
Mitsunari Satake; Mikio Nishio; Tomoyasu Murakami
Archive | 1996
Mikio Nishio
Archive | 1991
Chiaki Kudoh; Akito Uno; Mikio Nishio
Archive | 1997
Mikio Nishio
Archive | 1999
Mikio Nishio; Tomoyasu Murakami
Archive | 1995
Masataka Endo; Shin Hashimoto; Akemi Kawaguchi; Mikio Nishio; 明実 川口; 伸 橋本; 幹夫 西尾; 政孝 遠藤
Archive | 1993
Toyokazu Fujii; Mikio Nishio; Mitsuru Sekiguchi; Kazuhiko Hashimoto
