Tomoyasu Murakami
Panasonic
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Publication
Featured researches published by Tomoyasu Murakami.
The Japan Society of Applied Physics | 1996
Mikio Nishio; Tomoyasu Murakami; Masashi Hamanaka
We have studied a CMP system with a ring-shaped pressure plate, called Pad-Press Ring ( PPR ), to control the pad-profile during polishing. PPR works as an excellent iz-silz pad-profile controller and improves the polishing uniformity drastically. This system does not need the complicated ex-sinpaA-ptofile control, using the conventional film-backed carrier, two-layered pad, and fumed silica slurry. The non-uniformity of 6Yo calculated by ( Max-Min )+( 2 X Average ) is obtained with a wafer-edgo exclusion lenglh of 5 mm.
Archive | 1996
Tomoyasu Murakami; Mikio Nishio
Archive | 1997
Mitsunari Satake; Mikio Nishio; Tomoyasu Murakami
Archive | 1993
Kousaku Yano; Masayuki Endo; Yuka Terai; Noboru Nomura; Tomoyasu Murakami; Tetsuya Ueda; Satoshi Ueda
Archive | 1994
Tetsuya Ueda; Kousaku Yano; Tomoyasu Murakami; Michinari Yamanaka; Shuji Hirao; Noboru Nomura
Archive | 2006
Hideo Nakagawa; Masaru Sasago; Tomoyasu Murakami
Archive | 1996
Tomoyasu Murakami; Kousaku Yano
Archive | 1992
Tomoyasu Murakami; Michinari Yamanaka; Kousaku Yano; Masayuki Endo; Noboru Nomura; Staoshi Ueda; Naoto Matsuo; Hiroshi Imai; Masafumi Kubota
Archive | 1999
Mikio Nishio; Tomoyasu Murakami
Archive | 1997
Tomoyasu Murakami; Mikio Nishio; Mitsunari Satake
